Patents by Inventor Dirk Ingmar ULHENHAUT

Dirk Ingmar ULHENHAUT has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11639907
    Abstract: A device (1) for determining the dew point of a gas in a process chamber (2) which comprises a temperature control element (3) and a temperature sensor (4) for determining the temperature in the process chamber (2). The temperature sensor is in a thermally conductive functional connection with the temperature control element (3), and the temperature control element (3) is designed to actively heat and cool the temperature sensor (4). The temperature sensor is arranged in direct contact with the temperature control element (3).
    Type: Grant
    Filed: May 31, 2018
    Date of Patent: May 2, 2023
    Assignee: BELIMED AG
    Inventors: Dirk Ingmar Ulhenhaut, Jochen Ganz
  • Publication number: 20200116659
    Abstract: A device (1) for determining the dew point of a gas in a process chamber (2) which comprises a temperature control element (3) and a temperature sensor (4) for determining the temperature in the process chamber (2). The temperature sensor is in a thermally conductive functional connection with the temperature control element (3), and the temperature control element (3) is designed to actively heat and cool the temperature sensor (4). The temperature sensor is arranged in direct contact with the temperature control element (3).
    Type: Application
    Filed: May 31, 2018
    Publication date: April 16, 2020
    Inventors: Dirk Ingmar ULHENHAUT, Jochen GANZ