Abstract: A method of operating a capacitive measurement system for compensation of temperature influence is described. The capacitive measurement system includes at least one capacitive sensor member in an installed state and a capacitive measurement circuit for determining a complex impedance of an unknown capacitance from a complex sense current through the at least one capacitive sensor member. In the method, a calibration measurement is carried out to obtain temperature characteristics of both the real part and the imaginary part of determined impedances. In following impedance measurements of the unknown capacitance at a current temperature, the real part and the imaginary part of the measured impedance is determined, and based on the real part determined at the current temperature and the determined temperature characteristics of both the real part and the imaginary part, the imaginary part of the impedance determined at the current temperature is corrected.