Patents by Inventor Dirk Martinus Gerardus Petrus Wilhelmus JAKOBS

Dirk Martinus Gerardus Petrus Wilhelmus JAKOBS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Temperature conditioning system
    Patent number: 11835870
    Abstract: A passive flow induced vibration reduction system for use in a temperature conditioning system that controls the temperature of at least one component within a lithographic apparatus. This FIV reduction system includes: a conduit that provides a flow path for a liquid through the system; a liquid filled cavity in fluid connection with the conduit, wherein the fluid connection is provided via one or more openings in the wall of the conduit; a membrane configured such that it separates the liquid in the liquid filled cavity from a gas at a substantially ambient pressure and the membrane is configured such that compliance of the membrane reduces at least low frequency flow induced vibrations in the liquid flowing through the conduit; and an end-stop located on the gas side of the membrane, wherein the end-stop is configured to limit an extent of deflection of the membrane.
    Type: Grant
    Filed: June 18, 2020
    Date of Patent: December 5, 2023
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Güneş Nak{dot over (i)}boğlu, Nicholas Peter Waterson, Remco Van De Meerendonk, Steve Gregory Brust, Dirk Martinus Gerardus Petrus Wilhelmus Jakobs, Shravan Kottapalli
  • TEMPERATURE CONDITIONING SYSTEM
    Publication number: 20220350265
    Abstract: A passive flow induced vibration reduction system for use in a temperature conditioning system that controls the temperature of at least one component within a lithographic apparatus. This FIV reduction system includes: a conduit that provides a flow path for a liquid through the system; a liquid filled cavity in fluid connection with the conduit, wherein the fluid connection is provided via one or more openings in the wall of the conduit; a membrane configured such that it separates the liquid in the liquid filled cavity from a gas at a substantially ambient pressure and the membrane is configured such that compliance of the membrane reduces at least low frequency flow induced vibrations in the liquid flowing through the conduit; and an end-stop located on the gas side of the membrane, wherein the end-stop is configured to limit an extent of deflection of the membrane.
    Type: Application
    Filed: June 18, 2020
    Publication date: November 3, 2022
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Günes NAKIBOGLU, Nicholas Peter WATERSON, Remco VAN DE MEERENDONK, Steve Gregory BRUST, Dirk Martinus Gerardus Petrus Wilhelmus JAKOBS, Shravan KOTTAPALLI