Patents by Inventor Dirk Rexhaeuser

Dirk Rexhaeuser has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for connection of an optical element to a mount structure
    Patent number: 7400460
    Abstract: The invention relates to a method for connection of an optical element to a mount structure, whereby in a first step the optical element is connected to the mount structure and in a second step the optical element is welded to the mount structure in the region of the connection.
    Type: Grant
    Filed: April 16, 2005
    Date of Patent: July 15, 2008
    Assignee: Carl Zeiss SMT AG
    Inventors: Hubert Holderer, Bernhard Gellrich, Dirk Rexhaeuser
  • Apparatus for positioning an optical element in a structure
    Patent number: 7251086
    Abstract: In an apparatus for positioning an optical element in a structure, particularly in an objective housing of a projection objective for microlithography, the optical element is connected to the structure via fastening elements. The position of the optical element is set by means of adjusting fasteners. The fastening elements are arranged in such a way and the adjusting fasteners can be actuated in such a way that the optical element can be tilted about three mutually independent axes and can additionally be displaced in a translatory fashion in one axial direction.
    Type: Grant
    Filed: October 28, 2005
    Date of Patent: July 31, 2007
    Assignee: Carl Zeiss SMT AG
    Inventors: Ulrich Weber, Hubert Holderer, Dirk Rexhaeuser
  • Method for connection of an optical element to a mount structure
    Publication number: 20070171552
    Abstract: The invention relates to a method for connection of an optical element to a mount structure, whereby in a first step the optical element is connected to the mount structure and in a second step the optical element is welded to the mount structure in the region of the connection.
    Type: Application
    Filed: April 16, 2005
    Publication date: July 26, 2007
    Inventors: Hubert Holderer, Bernhard Gellrich, Dirk Rexhaeuser
  • Apparatus for positioning an optical element in a structure
    Publication number: 20060072217
    Abstract: In an apparatus for positioning an optical element in a structure, particularly in an objective housing of a projection objective for microlithography, the optical element is connected to the structure via fastening elements. The position of the optical element is set by means of adjusting fasteners.
    Type: Application
    Filed: October 28, 2005
    Publication date: April 6, 2006
    Applicant: Carl Zeiss SMT AG
    Inventors: Ulrich Weber, Hubert Holderer, Dirk Rexhaeuser
  • Apparatus for positioning an optical element in a structure
    Patent number: 6967792
    Abstract: In an apparatus for positioning an optical element in a structure, particularly in an objective housing of a projection objective for microlithography, the optical element is connected to the structure via fastening elements. The position of the optical element is set by means of adjusting fasteners. The fastening elements are arranged in such a way and the adjusting fasteners can be actuated in such a way that the optical element can be tilted about three mutually independent axes and can additionally be displaced in a translatory fashion in one axial direction.
    Type: Grant
    Filed: June 11, 2003
    Date of Patent: November 22, 2005
    Assignee: Carl Zeiss SMT AG
    Inventors: Ulrich Weber, Hubert Holderer, Dirk Rexhaeuser
  • Apparatus for positioning an optical element in a structure
    Publication number: 20030231412
    Abstract: In an apparatus for positioning an optical element in a structure, particularly in an objective housing of a projection objective for microlithography, the optical element is connected to the structure via fastening elements. The position of the optical element is set by means of adjusting fasteners.
    Type: Application
    Filed: June 11, 2003
    Publication date: December 18, 2003
    Applicant: Carl Zeiss SMT AG
    Inventors: Ulrich Weber, Hubert Holderer, Dirk Rexhaeuser