Abstract: A pair of intermeshing gears for multi-shaft vacuum pumps, comprising a first running gear and a second running gear is provided, wherein at least the first running gear comprises a first and a second gearwheel, respectively. The first and the second gearwheel are axially arranged in direct contact, wherein the first gearwheel comprises a predetermined number of first cogs of same dimension and the second gearwheel comprises a predetermined number of second cogs, wherein the predetermined number of second cogs is at least one. All of the predetermined number of first cogs have a dimension larger than the dimension of the predetermined number of second cogs to a predetermined amount. The first gearwheel is made of a material with a first elastic modulus. The second gearwheel is made of a material with a second elastic modulus, wherein the first and the second elastic modulus are different.

Abstract: Vacuum pump having a housing which defines a pump chamber and a drive chamber. A rotor is arranged in the housing, wherein the rotor has at least one rotor element arranged in the pump chamber for conveying a gaseous medium from an inlet to an outlet. Therein, the rotor extends from the pump chamber through a shaft feedthrough into the drive chamber. The shaft feedthrough has a connection, wherein the connection is connected to an underpressure, so that a barrier gas flows from the drive chamber at least partially through the shaft feedthrough to the connection.

Abstract: A processing chamber is connected to a lock chamber. For evacuating the lock chamber and/or the processing chamber a vacuum pump system is provided. The latter comprises a vacuum pump equipment having at least one vacuum pump. Further, the vacuum pump system comprises a valve device for connection to the lock chamber as well as a controller. For noise reduction, a cyclically occurring operating parameter is determined by means of the controller. From said parameter it is determined at which point in time the valve is opened such that temporally before the opening of the valve the rotational speed of at least one of the vacuum pumps can be reduced. This results in a considerable noise reduction at continuing good pump-out times.

Abstract: A vacuum pump system comprising a main vacuum pump that is connected to a chamber that is to be evacuated. An auxiliary pump is connected to an outlet of the main vacuum pump. Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device as a function of a predetermined control variable. Additionally, a method for controlling the vacuum pump system.

Abstract: Vacuum pump comprising a housing, a rotor shaft disposed in the housing, at least one bearing rotatably supporting the rotor shaft against the housing including an inner race in contact with the rotor shaft and an outer race in contact with the housing, and an axial spring applying an axial force onto the outer race, wherein a bearing ring is disposed between the axial spring and the outer race, the bearing ring applying a clamping force to the housing.

Abstract: A screw vacuum pump comprises a housing forming a pumping chamber, wherein the housing is made of aluminum or an aluminum alloy. Further provided are two screw rotors arranged in the pumping chamber, each screw rotor comprising at least one displacer element having a helical recess for forming a plurality of windings, wherein the at least one displacer element is made of aluminum or an aluminum alloy. Between the region in which prevail 5% to 30% of the outlet pressure and a pressure-side end of the rotor (pump outlet), at least six, particularly at least eight, and with particular preference at least ten windings are provided.

Abstract: A vacuum pump screw rotor, comprising at least two helical displacer elements on a rotor shaft. The at least two displacer elements have different pitches, but the pitches of each displacer element are constant. Furthermore, the displacer elements each have a helical recess, each having a contour that remains the same over its entire length. Hereby, a suction-side displacer element has a recess having an asymmetric contour, and a pressure-side displacer element has a recess having a symmetrical contour.

Abstract: A vacuum pump system is provided that includes a main vacuum pump that is connected to a chamber that is to be evacuated. An auxiliary pump is connected to an outlet of the main vacuum pump. Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device as a function of a predetermined control variable. Additionally, a method for controlling the vacuum pump system.

Abstract: A processing chamber is connected to a lock chamber. For evacuating the lock chamber and/or the processing chamber a vacuum pump system is provided. The latter comprises a vacuum pump equipment having at least one vacuum pump. Further, the vacuum pump system comprises a valve device for connection to the lock chamber as well as a controller. For noise reduction, a cyclically occurring operating parameter is determined by means of the controller. From said parameter it is determined at which point in time the valve is opened such that temporally before the opening of the valve the rotational speed of at least one of the vacuum pumps can be reduced. This results in a considerable noise reduction at continuing good pump-out times.

Abstract: Dual- or multi-shaft vacuum pump comprising an engine, a first shaft and at least one second shaft, wherein the first shaft and the second shaft are synchronously driven by the motor via a common drive belt. The first shaft has a pumping element and the second shaft likewise has a pumping element which cooperates with the pumping element of the first shaft in order to convey a gaseous medium from an inlet to an outlet. The first shaft has a first emergency running gear and the second shaft likewise has a second emergency running gear which meshes with the first emergency running gear.

Abstract: A vacuum pump system comprising a main vacuum pump that is connected to a chamber that is to be evacuated. An auxiliary pump is connected to an outlet of the main vacuum pump. Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device as a function of a predetermined control variable. Additionally, a method for controlling the vacuum pump system.

Abstract: A vacuum pump system for evacuating a chamber, in particular a lock or a process chamber, is provided that includes a main vacuum pump preferably configured as a screw pump. An inlet of the main vacuum pump is connected with the chamber to be evacuated. As seen in the feeding direction of the main vacuum pump an auxiliary vacuum pump is arranged which is in particular a Roots pump. An outlet area of the main vacuum pump is connected with a main outlet on the one hand and an inlet of the auxiliary vacuum pump on the other hand. Further, an outlet of the auxiliary vacuum pump is connected with the main outlet.

Abstract: A vacuum pump rotor comprises at least one displacement element arranged on a rotor shaft. The rotor shaft comprises at least one shaft end for a bearing element to be arranged thereon. The rotor element, the at least one displacement element and the at least one shaft end are made from aluminum or an aluminum alloy.

Abstract: A vacuum pump screw rotor, comprising at least two helical displacer elements on a rotor shaft. The at least two displacer elements have different pitches, but the pitches of each displacer element are constant. Furthermore, the displacer elements each have a helical recess, each having a contour that remains the same over its entire length. Hereby, a suction-side displacer element has a recess having an asymmetric contour, and a pressure-side displacer element has a recess having a symmetrical contour.

Abstract: A screw vacuum pump comprises a housing forming a pumping chamber, wherein the housing is made of aluminum or an aluminum alloy. Further provided are two screw rotors arranged in the pumping chamber, each screw rotor comprising at least one displacer element having a helical recess for forming a plurality of windings, wherein the at least one displacer element is made of aluminum or an aluminum alloy. Between the region in which prevail 5% to 30% of the outlet pressure and a pressure-side end of the rotor (pump outlet), at least six, particularly at least eight, and with particular preference at least ten windings are provided.

Abstract: A dry-compressing vacuum pump, in particular a screw pump, has two rotor elements (14) which are arranged in a pump chamber (12) and which are each carried by a rotor shaft (22). Two shaft ends of the rotor shafts (22) project through a side wall (28) of the pump housing (10). On the two shaft ends (28) there is arranged in each case one toothed belt pulley (38). Furthermore, a drive device and an electric motor for driving the rotor shaft (22) are provided. According to the invention, the rotor shafts (22) are driven by means of a toothed belt (40). To be able to use a toothed belt for drive purposes, a rotational flank clearance between the two rotor elements (14) of greater than ±0.75°, in particular greater than ±1°, is provided.

Abstract: A vacuum pump system comprising a plurality of vacuum pumps which are connected to one another in parallel and are each connected on an inlet side to a chamber, having an outlet line which is connected on the outlet side of the vacuum pumps, and an intermediate line which connects the inlet side of at least one vacuum pump to the outlet line, wherein all the vacuum pumps are connected in parallel during a pumping-out period and at least one of the vacuum pumps is connected in parallel with the other vacuum pumps as a backing pump during an idle period.

Abstract: A vacuum pump system for evacuating a chamber, in particular a lock or a process chamber, comprises a main vacuum pump preferably configured as a screw pump. An inlet of the main vacuum pump is connected with the chamber to be evacuated. As seen in the feeding direction of the main vacuum pump an auxiliary vacuum pump is arranged which is in particular a Roots pump. An outlet area of the main vacuum pump is connected with a main outlet on the one hand and an inlet of the auxiliary vacuum pump on the other hand. Further, an outlet of the auxiliary vacuum pump is connected with the main outlet.

Abstract: A vacuum pump, in particular a pump of the type with rolling bodies, includes rotary bodies (12) arranged in a suction chamber (10). The pressure side (30) of the pump is connected to the suction side (20) by a connecting channel (22). In the connecting channel (22), a valve (24) is arranged which closes a through opening (32). On exceeding a set pressure difference between the pressure side (30) and the suction side (20), the valve opens automatically. In order to reduce the necessary space and to reduce the switching noise from the valve, the valve body is embodied as a valve flap (28).

Abstract: An end wall arrangement for an engine compartment of a motor vehicle is provided that includes an end wall, at least one component mounted on the end wall, and a planar covering element having sound-absorbing properties. The covering element is provided with at least one flap having heat-insulating properties and being configured optionally to cover the at least one component or to render the component accessible.