Patents by Inventor Divyanshu Agrawal
Divyanshu Agrawal has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9966194Abstract: A MEMs actuator device and method of forming includes arrays of actuator elements. Each actuator element has a moveable top plate and a bottom plate. The top plate includes a central membrane member and a cantilever spring for movement of the central membrane member. The bottom plate consists of two RF signal lines extending under the central membrane member. A MEMs electrostatic actuator device includes a CMOS wafer, a MEMs wafer, and a ball bond assembly. Interconnections are made from a ball bond to an associated through-silicon-via (TSV) that extends through the MEMS wafer. A RF signal path includes a ball bond electrically connected through a TSV and to a horizontal feed bar and from the first horizontal feed bar vertically into each column of the array. A metal bond ring extends between the CMOS wafer and the MEMS wafer. An RF grounding loop is completed from a ground shield overlying the array to the metal bond ring, a TSV and to a ball bond.Type: GrantFiled: December 20, 2016Date of Patent: May 8, 2018Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Arun Gupta, William C. McDonald, Adam Fruehling, Ivan Kmecko, Lance Barron, Divyanshu Agrawal, Arthur M. Turner, John C. Ehmke
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Patent number: 9709802Abstract: In described examples, a DMD includes an array of micromirror pixels. Each pixel includes a right electrode on a first side of the pixel, a left electrode on a second side of the pixel adjacent the first side, and a cantilevered beam supporting a mirror. The cantilever beam tilts on two axes of translation: pitch and roll. The mirror has: a first landed position (on a first and second spring tip) over the right electrode; and a second landed position (on the first and a third spring tip) over the left electrode, such that the first landed position and the second landed positions are 90° apart. In transitioning from the first landed position to the second landed position, the mirror maintains contact with the first spring tip while rolling from the second spring tip to the third spring tip.Type: GrantFiled: May 20, 2016Date of Patent: July 18, 2017Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: William C. McDonald, James N. Hall, Mark F. Reed, Lance W. Barron, Terry A. Bartlett, Divyanshu Agrawal
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Publication number: 20170098509Abstract: A MEMs actuator device and method of forming includes arrays of actuator elements. Each actuator element has a moveable top plate and a bottom plate. The top plate includes a central membrane member and a cantilever spring for movement of the central membrane member. The bottom plate consists of two RF signal lines extending under the central membrane member. A MEMs electrostatic actuator device includes a CMOS wafer, a MEMs wafer, and a ball bond assembly. Interconnections are made from a ball bond to an associated through-silicon-via (TSV) that extends through the MEMS wafer. A RF signal path includes a ball bond electrically connected through a TSV and to a horizontal feed bar and from the first horizontal feed bar vertically into each column of the array. A metal bond ring extends between the CMOS wafer and the MEMS wafer. An RF grounding loop is completed from a ground shield overlying the array to the metal bond ring, a TSV and to a ball bond.Type: ApplicationFiled: December 20, 2016Publication date: April 6, 2017Inventors: Arun Gupta, William C. McDonald, Adam Fruehling, Ivan Kmecko, Lance Barron, Divyanshu Agrawal, Arthur M. Turner, John C. Ehmke
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Patent number: 9573801Abstract: A MEMs actuator device and method of forming includes arrays of actuator elements. Each actuator element has a moveable top plate and a bottom plate. The top plate includes a central membrane member and a cantilever spring for movement of the central membrane member. The bottom plate consists of two RF signal lines extending under the central membrane member. A MEMs electrostatic actuator device includes a CMOS wafer, a MEMs wafer, and a ball bond assembly. Interconnections are made from a ball bond to an associated through-silicon-via (TSV) that extends through the MEMS wafer. A RF signal path includes a ball bond electrically connected through a TSV and to a horizontal feed bar and from the first horizontal feed bar vertically into each column of the array. A metal bond ring extends between the CMOS wafer and the MEMS wafer. An RF grounding loop is completed from a ground shield overlying the array to the metal bond ring, a TSV and to a ball bond.Type: GrantFiled: February 15, 2016Date of Patent: February 21, 2017Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Arun Gupta, William C. McDonald, Adam Fruehling, Ivan Kmecko, Lance Barron, Divyanshu Agrawal
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Publication number: 20160266377Abstract: In described examples, a DMD includes an array of micromirror pixels. Each pixel includes a right electrode on a first side of the pixel, a left electrode on a second side of the pixel adjacent the first side, and a cantilevered beam supporting a mirror. The cantilever beam tilts on two axes of translation: pitch and roll. The mirror has: a first landed position (on a first and second spring tip) over the right electrode; and a second landed position (on the first and a third spring tip) over the left electrode, such that the first landed position and the second landed positions are 90° apart. In transitioning from the first landed position to the second landed position, the mirror maintains contact with the first spring tip while rolling from the second spring tip to the third spring tip.Type: ApplicationFiled: May 20, 2016Publication date: September 15, 2016Inventors: William C. McDonald, James N. Hall, Mark F. Reed, Lance W. Barron, Terry A. Bartlett, Divyanshu Agrawal
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Publication number: 20160176701Abstract: A MEMs actuator device and method of forming includes arrays of actuator elements. Each actuator element has a moveable top plate and a bottom plate. The top plate includes a central membrane member and a cantilever spring for movement of the central membrane member. The bottom plate consists of two RF signal lines extending under the central membrane member. A MEMs electrostatic actuator device includes a CMOS wafer, a MEMs wafer, and a ball bond assembly. Interconnections are made from a ball bond to an associated through-silicon-via (TSV) that extends through the MEMS wafer. A RF signal path includes a ball bond electrically connected through a TSV and to a horizontal feed bar and from the first horizontal feed bar vertically into each column of the array. A metal bond ring extends between the CMOS wafer and the MEMS wafer. An RF grounding loop is completed from a ground shield overlying the array to the metal bond ring, a TSV and to a ball bond.Type: ApplicationFiled: February 15, 2016Publication date: June 23, 2016Inventors: Arun Gupta, William C. McDonald, Adam Fruehling, Ivan Kmecko, Lance Barron, Divyanshu Agrawal, Arthur M. Turner, John C. Ehmke, James C. Baker
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Patent number: 9348136Abstract: A DMD having an array of micromirror pixels wherein each pixel comprises a right electrode on a first side of the pixel, a left electrode on a second side of the pixel adjacent the first side and a cantilevered beam supporting a mirror. The cantilever beam tilts on two axes of translation: pitch and roll. The mirror has a first landed position (on a first and second spring tip) over the right electrode and a second landed position (on the first and a third spring tip) over the left electrode such that the first landed position and the second landed positions are 90° apart. In transitioning from the first landed position to the second landed position, the mirror maintains contact with the first spring tip while rolling from the second spring tip to the third spring tip.Type: GrantFiled: May 13, 2014Date of Patent: May 24, 2016Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: William C. McDonald, James N. Hall, Mark F. Reed, Lance W. Barron, Terry A. Bartlett, Divyanshu Agrawal
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Patent number: 9003882Abstract: A high-Q, mode-matched, vibratory tuning fork based MEMS device, capable of sensing rotational and translational motion around three axes, and processes of fabrication are disclosed herein. In one embodiment, a MEMS device has first and second proof masses actuated along a first axis, and a third and fourth proof masses actuated along a second orthogonal axis. Each of the proof masses includes an inner mass mechanically coupled to an outer frame. A plurality of electrodes sense rotational or translational motion along the three orthogonal axes.Type: GrantFiled: November 3, 2011Date of Patent: April 14, 2015Assignee: Georgia Tech Research CorporationInventors: Farrokh Ayazi, Divyanshu Agrawal
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Publication number: 20150070749Abstract: A DMD having an array of micromirror pixels wherein each pixel comprises a right electrode on a first side of the pixel, a left electrode on a second side of the pixel adjacent the first side and a cantilevered beam supporting a mirror. The cantilever beam tilts on two axes of translation: pitch and roll. The mirror has a first landed position (on a first and second spring tip) over the right electrode and a second landed position (on the first and a third spring tip) over the left electrode such that the first landed position and the second landed positions are 90° apart. In transitioning from the first landed position to the second landed position, the mirror maintains contact with the first spring tip while rolling from the second spring tip to the third spring tip.Type: ApplicationFiled: May 13, 2014Publication date: March 12, 2015Inventors: William C. McDonald, James N. Hall, Mark F. Reed, Lance W. Barron, Terry A. Bartlett, Divyanshu Agrawal