Patents by Inventor Dmitrii Leshchev

Dmitrii Leshchev has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • LOW TEMPERATURE DEPOSITION OF PURE MOLYBENUM FILMS
    Publication number: 20240047215
    Abstract: Methods for depositing molybdenum films on a substrate are described. The substrate is exposed to a molybdenum halide precursor and an aluminum precursor to form the molybdenum film (e.g., elemental molybdenum) at a low temperature. The exposures can be sequential or simultaneous.
    Type: Application
    Filed: October 12, 2023
    Publication date: February 8, 2024
    Applicant: Applied Materials, Inc.
    Inventors: Kunal Bhatnagar, Dmitrii Leshchev, Mohith Verghese, Jose Alexandro Romero
  • Low temperature deposition of pure molybenum films
    Patent number: 11854813
    Abstract: Methods for depositing molybdenum films on a substrate are described. The substrate is exposed to a molybdenum halide precursor and an aluminum precursor to form the molybdenum film (e.g., elemental molybdenum) at a low temperature. The exposures can be sequential or simultaneous.
    Type: Grant
    Filed: February 24, 2021
    Date of Patent: December 26, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Kunal Bhatnagar, Dmitrii Leshchev, Mohith Verghese, Jose Alexandro Romero
  • LOW TEMPERATURE DEPOSITION OF PURE MOLYBENUM FILMS
    Publication number: 20220270883
    Abstract: Methods for depositing molybdenum films on a substrate are described. The substrate is exposed to a molybdenum halide precursor and an aluminum precursor to form the molybdenum film (e.g., elemental molybdenum) at a low temperature. The exposures can be sequential or simultaneous.
    Type: Application
    Filed: February 24, 2021
    Publication date: August 25, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Kunal Bhatnagar, Dmitrii Leshchev, Mohith Verghese, Alex Romero