Abstract: A method of determining sizes of micro and nano objects in a scanning electron microscope, comprising the steps of obtaining an experimental video signal of an object in a scanning electron microscope, determining a size of an object from the obtained experimental video signal, calculating a model video signal based on the size of an object obtained from the experimental video signal and other values of the object in the scanning electron microscope, determining a size of the object from the model video signal, determining a correction based on a difference between the size of the object obtained from the experimental video signal and the size of the object obtained from the model video signal, and using the correction to determine a corrective size of the object from the size of the object determined from the experimental video signal and the thusly determined correction.

Abstract: A method of measuring an area of an micro object has the steps of introducing in a scanning electron microscope an object to be measured, so as to obtain an image of the object; on a print or in a memory; separating a first line from the image; localizing a left edge and a right edge on the first line of the separated image; calculating a distance between the left edge and the right edge of the first line of the object separating further lines and repeating the steps of localization and calculation to obtain the distances between the left edge and the right edge of subsequent lines of the object calculating a total length of the distances; and calculating an area of the object as a product of the total length L and a distance ?Y between the lines of the image:

Abstract: A method of calibration of magnification of a microscope with the use of a diffraction grating has the steps of determining a mean period of a diffraction grating by irradiating the diffraction grating with an electromagnetic radiation having a known wavelength and analyzing a resulting diffraction pattern, determining a scatter of individual values of a period of the diffraction grating by multiple measurements of periods of the diffraction grating by a microscope in pixels in one area in a microscope field of view, and calculating a mean value of the period and the scatter based on the measurements, determining a sufficient number of measurements of the period for providing an accepted statistic error of a magnification of the microscope, performing measurements corresponding to the determined acceptable number of measurements, of individual values of the period in pixels in a plurality of portions of the diffraction grating, calculating a general mean value of the period in pixels based on the immediately

Abstract: A method of controlling removal of photoresist in openings of a photoresist mask has the steps of obtaining in a scanning electron microscope a video signal of a bottom of an opening of a photoresist mask, and comparing values of the video signal in different points of an image which contains the opening to be controlled.

Abstract: A method evaluating a measuring electron microscope, comprising the steps of setting such modes of operation of a microscope, that will be used for subsequent measurements of sizes and line edge roughness; introducing a test-object which has a known straight edge into a chamber of objects of the microscope; orienting the test object on a stage of the microscope; scanning the test object with an electron beam; obtaining an image of the edge of the test object and saving the image in a digital form; localizing the edge of the test object and saving the image in a digital form; localizing the edge of the test object on the image on each line of scanning; producing storing a set of values of a coordinate X(i) which correspond to a position of the edge of an i-th line of scanning; approximating the sets of values X(i) with a straight line; calculating deviations P(I) of coordinates X(i) from a straight line on each line of scanning; analyzing a set of values of the deviations ?(i); calculating an ?ave and a maxima

Abstract: A method evaluating a measuring electron microscope, comprising the steps of setting such modes of operation of a microscope, that will be used for subsequent measurements of sizes and line edge roughness; introducing a test-object which has a known straight edge into a chamber of objects of the microscope; orienting the test object on a stage of the microscope; scanning the test object with an electron beam; obtaining an image of the edge of the test object and saving the image in a digital form; localizing the edge of the test object and saving the image in a digital form; localizing the edge of the test object on the image on each line of scanning; producing storing a set of values of a coordinate X(i) which correspond to a position of the edge of an i-th line of scanning; approximating the sets of values X(i) with a straight line; calculating deviations P(I) of coordinates X(i) from a straight line on each line of scanning; analyzing a set of values of the deviations ?(i); calculating an ?ave and a maxima

Abstract: A line edge roughness of micro objects is determined in a microscope by corresponding scanning and determination of deviations of points of the edge from a straight line.

Abstract: A method of controlling removal of photoresist in openings of a photoresist mask has the steps of obtaining in a scanning electron microscope a video signal of a bottom of an opening of a photoresist mask, and comparing values of the video signal in different points of an image which contains the opening to be controlled.

Abstract: A method of calibration of magnification of a microscope with the use of a diffraction grating has the steps of determining a mean period of a diffraction grating by irradiating the diffraction grating with an electromagnetic radiation having a known wavelength and analyzing a resulting diffraction pattern, determining a scatter of individual values of a period of the diffraction grating by multiple measurements of periods of the diffraction grating by a microscope in pixels in one area in a microscope field of view, and calculating a mean value of the period and the scatter based on the measurements, determining a sufficient number of measurements of the period for providing an accepted statistic error of a magnification of the microscope, performing measurements corresponding to the determined acceptable number of measurements, of individual values of the period in pixels in a plurality of portions of the diffraction grating, calculating a general mean value of the period in pixels based on the immediately

Abstract: A method of precision calibration of magnification of scanning microscopes with the use of a test diffraction grating includes positioning a test object on a stage of microscope so that strips of a test diffraction grating are perpendicular to a direction along which a calibration is performed, scanning of a selected portion of the test object along axes X and Y, measuring values of a signal S versus coordinates x and y in a plane of scanning and storing of the values S (x, y) in a digital form as a two-dimensional digital array, transforming the two-dimensional array of signals S(x, y) into a two-dimensional array S (u, v) by turning of the axes so that a direction of a new axis u is perpendicular to the strips of the grating and a direction of a new axis v coincides with the strips of the grating, line-by-line mathematical processing of the array S(u,v) for each line, converting of the one dimensional, complex function into a one-dimension spectrum of real values of a module, finding from the spectrum of th

Abstract: A method of precision calibration of magnification of scanning microscopes with the use of a test diffraction grating has the steps of positioning an orientation of a test object on a stage of microscope so that strips of a test diffraction grating are perpendicular to a directional on which a calibration is performed, scanning of a selected portion of the test object along axes X and Y; measuring values of a signal S versus coordinates x and y in a plane of scanning and storing said values S(x, y) in a digital form as a two-dimensional digital array; transforming the two-dimensional array of signals S(x, y) into a two-dimensional array S(u, v) by turning of the axes so that a direction of a new axis U is perpendicular to the strips of the grating and a direction of a new axis V coincides with the strips of the grating; line-by-line mathematical processing in a new manner.

Abstract: A method of diagnosing a parameter of a scanning electron microscope such as magnification, linearity and stability, includes loading a reference material into a microscope, setting a permissible limit of a value of the parameters, inputting a pitch of the reference material, inputting a magnification of the microscope, acquiring a set of digital images on the reference material, analyzing the digital image line after line with determination of a pitch of features of the image in each line, in mutually orthogonal directions, checking if all lines of the digital image has been analyzed, determining a mean value of the pitch of the features in each orthogonal direction, comparing the obtained value of the pitch of the image with a known value of the pitch of the reference material to determine a ratio indicative of a modification, and determining a precision of the measurements of the pitch by statistical analysis of the pitch measurements.

Abstract: A line edge roughness of micro objects is determined in a microscope by corresponding scanning and determination of deviations of points of the edge from a straight line.

Abstract: A method of precision calibration of magnification of scanning microscopes with the use of a test diffraction grating includes positioning and orientation of a test object on a stage of microscope so that strips of a test diffraction grating are perpendicular to a direction along which a calibration is performed, scanning of a selected portion of the test object along axes X and Y, measuring values of a signal S versus on coordinates x and y in a plane of scanning and storing of the values S (x, y) in a digital form as a two-dimensional digital array, transforming the two-dimensional array of signals S(x, y) into a two-dimensional array S (u, v) by turning of the axes so that a direction of a new axis u is perpendicular to the strips of the grating and a direction of a new axis v coincides with the strips of the grating, line-by-line mathematical processing of the array S(u) including for each line approximating of an array of discrete values S(u, v) with a periodical analytical function determining a pitch o

Abstract: A method of automatically correcting magnification and/or non linearity of scanning electron microscope has the steps of loading a reference material in the microscope, inputting a pitch of the reference material and a nominal magnification of the microscope, obtaining an image of the reference material, determining a pitch and/or a linearity of the image of the reference material, comparing the pitch of the image with the inputted pitch of the reference material to obtain a ratio indicative of the magnification and/or comparing the magnification in different locations across an image field indicative of the linearity, comparing the thusly determined magnification with the nominal magnification, and if an error of magnification exceeds a predetermined value, adjusting the scanning electron microscope.

Abstract: A method of precision calibration of magnification of a scanning microscope with the use of a test diffraction grating has the steps of positioning and orienting of a test object on a stage of microscopes so that strips of a test diffraction grating are perpendicular to a direction along which a calibration is performed, scanning a selected portion of the test object along axes X and Y, measuring values of a signal S versus coordinates x and y in a plane of scanning and storing the values S (x,y) in a digital form as a two-dimensional digital array, transforming the two-dimensional array of signals (x, y) into a two-dimensional array S(u, v) by turning of the axes so that a direction of a new axis U is perpendicular to the strips of grating and a direction of a new axis V coincides with the strips of the grating, line-by-line mathematical processing of the array S(u, v) in a new manner.

Abstract: A method of precision calibration of magnification of scanning microscopes with the use of a test diffraction grating includes positioning and orientation of a test object on a stage of microscope so that strips of a test diffraction grating are perpendicular to a direction along which a calibration is performed, scanning of a selected portion of the test object along axes X and Y, measuring values of a signal S versus on coordinates x and y in a plane of scanning and storing of the values S (x, y) in a digital form as a two-dimensional digital array, transforming the two-dimensional array of signals S(x, y) into a two-dimensional array S (u, v) by turning of the axes so that a direction of a new axis u is perpendicular to the strips of the grating and a direction of a new axis v coincides with the strips of the grating, line-by-line mathematical processing of the array S(u) including for each line approximating of an array of discrete values S(u,v) with a periodical analytical function determining a pitch of

Abstract: A method of precision calibration of magnification of scanning microscopes with the use of a test diffraction grating has the steps of positioning an orientation of a test object on a stage of microscope so that strips of a test diffraction grating are perpendicular to a directional on which a calibration is performed, scanning of a selected portion of the test object along axes X and Y; measuring values of a signal S versus coordinates x and y in a plane of scanning and storing said values S(x, y) in a digital form as a two-dimensional digital array; transforming the two-dimensional array of signals S(x, y) into a two-dimensional array S(u, v) by turning of the axes so that a direction of a new axis U is perpendicular to the strips of the grating and a direction of a new axis V coincides with the strips of the grating; line-by-line mathematical processing in a new manner.

Abstract: A method of precision calibration of magnification of a scanning microscopes with the use of a test diffraction grating has the steps of positioning and orientation of a test object on a stage of microscope so that strips of a test diffraction grating are perpendicular to a direction along which a calibration is performed, scanning a selected portion of the test object along axes X and Y, measuring values of a signal S versus coordinates x and y in a plane of scanning and storing the values S (x, y) in a digital form as a two-dimensional digital array, transforming the two-dimensional array of signals S (x, y) into a two-dimensional array S(u,v) by turning of the axes so that a direction of a new axis U is perpendicular to the strips of grating and a direction of a new axis V coincides with the strips of the grating, line-by-line mathematical processing of the array S(u, v) in a new manner.

Abstract: A method of precision calibration of magnification of scanning microscopes with the use of a test diffraction grating includes positioning and orientation of a test object on a stage of microscope so that strips of a test diffraction grating are perpendicular to a direction along which a calibration is performed, scanning of a selected portion of the test object along axes X and Y, measuring values of a signal S versus coordinates x and y in a plane of scanning and storing of the values S (x, y) in a digital form as a two-dimensional digital array, transforming the two-dimensional array of signals S(x, y) into a two-dimensional array S (u, v) by turning of the axes so that a direction of a new axis u is perpendicular to the strips of the grating and a direction of a new axis v coincides with the strips of the grating, line-by-line mathematical processing of the array S(u,v) for each line, converting of the one dimensional, complex function into a one-dimension spectrum of real values of a module, finding from