Patents by Inventor DMITRY A. DZILNO

DMITRY A. DZILNO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190326096
    Abstract: Embodiments described herein include a modular high-frequency emission source comprising a plurality of high-frequency emission modules and a phase controller. In an embodiment, each high-frequency emission module comprises an oscillator module, an amplification module, and an applicator. In an embodiment, each oscillator module comprises a voltage control circuit and a voltage controlled oscillator. In an embodiment, each amplification module is coupled to an oscillator module, in an embodiment, each applicator is coupled to an amplification module. In an embodiment, the phase controller is communicatively coupled to each oscillator module.
    Type: Application
    Filed: April 20, 2018
    Publication date: October 24, 2019
    Inventors: PHILIP ALLAN KRAUS, THAI CHENG CHUA, CHRISTIAN AMORMINO, DMITRY A. DZILNO
  • Publication number: 20130018500
    Abstract: Methods and apparatus are disclosed herein. In some embodiments, methods of controlling process chambers may include predetermining a relationship between pressure in a processing volume and a position of an exhaust valve as a function of a process parameter; setting the process chamber to a first state having a first pressure in the processing volume and a first value of the process parameter, wherein the exhaust valve is set to a first position based on the predetermined relationship to produce the first pressure at the first value; determining a pressure control profile to control the pressure as the process chamber is changed to a second state having a second pressure and a second process parameter value from the first state; and applying the pressure control profile to control the pressure by varying the position of the exhaust valve while changing the process chamber to the second state.
    Type: Application
    Filed: July 15, 2011
    Publication date: January 17, 2013
    Applicant: APPLIED MATERIALS, INC.
    Inventors: KEITH BRIAN PORTHOUSE, JOHN W. LANE, MARIUSCH GREGOR, NIR MERRY, MICHAEL R. RICE, ALEX MINKOVICH, HONGBIN LI, DMITRY A. DZILNO