Patents by Inventor Dmitry KURILOVICH

Dmitry KURILOVICH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MEMBRANE CLEANING APPARATUS
    Publication number: 20240142871
    Abstract: A membrane cleaning apparatus for removing particles from a membrane, the apparatus including: a membrane support for supporting the membrane; and a pressure pulse generating mechanism including one or more laser energy sources configured to generate a pressure pulse in a gas. The one or more energy laser sources may be focused to generate a pressure pulse in a gaseous atmosphere. The pressure pulse serves to dislodge particles on the membrane.
    Type: Application
    Filed: August 25, 2020
    Publication date: May 2, 2024
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Andrey NIKIPELOV, Dmitry KURILOVICH
  • MEMBRANE CLEANING APPARATUS
    Publication number: 20230311173
    Abstract: A membrane cleaning apparatus for removing particles from a membrane, the apparatus including a membrane support and an electric field generating mechanism. The membrane support is for supporting the membrane. The electric field generating mechanism is for generating an electric field in the vicinity of the membrane when supported by the membrane support. The electric field generating mechanism may include: one or more collector electrodes; and a mechanism for applying a voltage across a membrane supported by the membrane support and the or each of the one or more collector electrodes.
    Type: Application
    Filed: June 7, 2023
    Publication date: October 5, 2023
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Andrey NIKIPELOV, Dmitry KURILOVICH, Fabio SBRIZZAI, Marcus Adrianus VAN DE KERKHOF, Ties Wouter VAN DER WOORD, Willem Joan VAN DER ZANDE, Jeroen VAN DUIVENBODE, David Ferdinand VLES
  • Membrane cleaning apparatus
    Patent number: 11673169
    Abstract: A membrane cleaning apparatus for removing particles from a membrane, the apparatus including a membrane support and an electric field generating mechanism. The membrane support is for supporting the membrane. The electric field generating mechanism is for generating an electric field in the vicinity of the membrane when supported by the membrane support. The electric field generating mechanism may include: one or more collector electrodes; and a mechanism for applying a voltage across a membrane supported by the membrane support and the or each of the one or more collector electrodes.
    Type: Grant
    Filed: November 22, 2019
    Date of Patent: June 13, 2023
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Andrey Nikipelov, Dmitry Kurilovich, Fabio Sbrizzai, Marcus Adrianus Van de Kerkhof, Ties Wouter Van der Woord, Willem Joan Van der Zande, Jeroen Van Duivenbode, David Ferdinand Vles
  • MEMBRANE CLEANING APPARATUS
    Publication number: 20220008963
    Abstract: A membrane cleaning apparatus for removing particles from a membrane, the apparatus including a membrane support and an electric field generating mechanism. The membrane support is for supporting the membrane. The electric field generating mechanism is for generating an electric field in the vicinity of the membrane when supported by the membrane support. The electric field generating mechanism may include: one or more collector electrodes; and a mechanism for applying a voltage across a membrane supported by the membrane support and the or each of the one or more collector electrodes.
    Type: Application
    Filed: November 22, 2019
    Publication date: January 13, 2022
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Andrey NIKIPELOV, Dmitry KURILOVICH, Fabio SBRIZZAI, Marcus Adrianus VAN DE KERKHOF, Ties Wouter VAN DER WOORD, Willem Joan VAN DER ZANDE, Jeroen VAN DUIVENBODE, David Ferdinand VLES