Patents by Inventor Dmitry Perlroizen

Dmitry Perlroizen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • AUTOMATED MODEL BUILDING AND MODEL UPDATING
    Publication number: 20120303142
    Abstract: A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated with a manufacturing process, a process tool or chamber. Variables associated with the manufacturing process are acquired, monitored, and analyzed. A statistical analysis (or multivariate statistical analysis) is employed to analyze the monitored variables and the set of parameters. When any of the monitored variables satisfy a threshold condition, a new model is created or the parameters of the previously-created model are updated, adjusted, or modified based on the template and the monitored variables. A user interface facilitating communication between a user and the systems and display of information is also described.
    Type: Application
    Filed: August 7, 2012
    Publication date: November 29, 2012
    Applicant: MKS Instruments Inc.
    Inventors: Lawrence Hendler, Stela Diamant Lazarovich, Ron Hadar, Nouna Kettaneh, Uzi Levami, Dmitry Perlroizen
  • Automated model building and model updating
    Patent number: 8271103
    Abstract: A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated with a manufacturing process, a process tool or chamber. Variables associated with the manufacturing process are acquired, monitored, and analyzed. A statistical analysis (or multivariate statistical analysis) is employed to analyze the monitored variables and the set of parameters. When any of the monitored variables satisfy a threshold condition, a new model is created or the parameters of the previously-created model are updated, adjusted, or modified based on the template and the monitored variables. A user interface facilitating communication between a user and the systems and display of information is also described.
    Type: Grant
    Filed: May 1, 2008
    Date of Patent: September 18, 2012
    Assignee: MKS Instruments, Inc.
    Inventors: Lawrence Hendler, Stela Diamant Lazarovich, Ron Hadar, Nouna Kettaneh, Uzi Levami, Dmitry Perlroizen
  • Automated Model Building and Model Updating
    Publication number: 20090037013
    Abstract: A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated with a manufacturing process, a process tool or chamber. Variables associated with the manufacturing process are acquired, monitored, and analyzed. A statistical analysis (or multivariate statistical analysis) is employed to analyze the monitored variables and the set of parameters. When any of the monitored variables satisfy a threshold condition, a new model is created or the parameters of the previously-created model are updated, adjusted, or modified based on the template and the monitored variables. A user interface facilitating communication between a user and the systems and display of information is also described.
    Type: Application
    Filed: May 1, 2008
    Publication date: February 5, 2009
    Applicant: MKS Instruments, Inc.
    Inventors: Lawrence Hendler, Stela Diamant Lazarovich, Ron Hadar, Nouna Kettaneh, Uzi Levami, Dmitry Perlroizen