Patents by Inventor Dmytro L. Voronov

Dmytro L. Voronov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ultra-high density diffraction grating
    Patent number: 8331027
    Abstract: A diffraction grating structure having ultra-high density of grooves comprises an echellette substrate having periodically repeating recessed features, and a multi-layer stack of materials disposed on the echellette substrate. The surface of the diffraction grating is planarized, such that layers of the multi-layer stack form a plurality of lines disposed on the planarized surface of the structure in a periodical fashion, wherein lines having a first property alternate with lines having a dissimilar property on the surface of the substrate. For example, in one embodiment, lines comprising high-Z and low-Z materials alternate on the planarized surface providing a structure that is suitable as a diffraction grating for EUV and soft X-rays. In some embodiments, line density of between about 10,000 lines/mm to about 100,000 lines/mm is provided.
    Type: Grant
    Filed: July 28, 2009
    Date of Patent: December 11, 2012
    Assignee: The Regents of the University of California
    Inventors: Howard A. Padmore, Dmytro L. Voronov, Rossana Cambie, Valeriy V. Yashchuk, Eric M. Gullikson
  • Ultra-high Density Diffraction Grating
    Publication number: 20100053611
    Abstract: A diffraction grating structure having ultra-high density of grooves comprises an echellette substrate having periodically repeating recessed features, and a multi-layer stack of materials disposed on the echellette substrate. The surface of the diffraction grating is planarized, such that layers of the multi-layer stack form a plurality of lines disposed on the planarized surface of the structure in a periodical fashion, wherein lines having a first property alternate with lines having a dissimilar property on the surface of the substrate. For example, in one embodiment, lines comprising high-Z and low-Z materials alternate on the planarized surface providing a structure that is suitable as a diffraction grating for EUV and soft X-rays. In some embodiments, line density of between about 10,000 lines/mm to about 100,000 lines/mm is provided.
    Type: Application
    Filed: July 28, 2009
    Publication date: March 4, 2010
    Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
    Inventors: Howard A. Padmore, Dmytro L. Voronov, Rossana Cambie, Valeriy V. Yashchuk, Eric M. Gullikson