Abstract: A baffle assembly of this application has an assembling connector for maintaining a coupled state by means of a vertical binding force Fverticality for locking a baffle plate, which has fluid-passing through-holes, to the side surface of a baffle body, which has fluid-passing through-holes, and lateral tightening force Fhorizontality for pressing the same, such that the baffle body and the baffle plate can be assembled in a fitted manner and, particularly, a double locking state is formed by the vertical binding force Fverticality and the lateral tightening force Fhorizontality, thereby preventing a change of the coupled state.

Abstract: A baffle assembly of this application has an assembling connector for maintaining a coupled state by means of a vertical binding force Fverticality for locking a baffle plate, which has fluid-passing through-holes, to the side surface of a baffle body, which has fluid-passing through-holes, and lateral tightening force Fhorizontality for pressing the same, such that the baffle body and the baffle plate can be assembled in a fitted manner and, particularly, a double locking state is formed by the vertical binding force Fverticality and the lateral tightening force Fhorizontality, thereby preventing a change of the coupled state.

Abstract: A flow indicator is disclosed and includes a horizontally disposed housing having a lower cap with a lower inlet port drawing in an air sample, an interior space passing the air sample, an upper cap having an upper outlet port exhausting the air sample, and a transparent tube coupled between the lower and upper caps and functioning as a transparent window allowing visual observation of at least a portion of the interior space. The flow indicator also includes a floater disposed within the housing and moving vertically in response to the flow of the air sample to indicate a flow rate for the air sample.

Abstract: A flow indicator includes a horizontally disposed housing having a lower inlet port drawing in an air sample, an interior space passing the air sample, an upper outlet port exhausting the air sample, and a transparent window allowing visual observation of at least a portion of the interior space. The flow indicator also includes a floater disposed within the housing to move vertically in response to the flow of the air sample to indicate a flow rate for the air sample, and a guide member extending upward from a lower portion of the housing and guiding movement of the floater.

Abstract: A flow indicator is disclosed and includes a horizontally disposed housing including a lower inlet port drawing in an air sample, an interior space passing the air sample, an upper outlet port exhausting the air sample, and a transparent window allowing visual observation of at least a portion of the interior space. The flow indicator also includes a floater disposed within the housing and moving vertically in response to the flow of the air sample to indicate a flow rate for the air sample, wherein the housing further comprises a plurality of rails protruding from an inner surface of the housing and extending vertically to guide movement of the floater.

Abstract: A flow indicator comprising a housing and a floater and adapted to draw an air sample is provided. The housing has at least one lower inlet port, an interior space, an upper outlet port, and a transparent window. The floater is disposed inside the housing and is adapted to move substantially vertically in accordance with the flow of the air sample. The floater is also adapted to indicate a flow rate of the air sample.

Abstract: A particle adsorption device includes a chamber having an inlet and an outlet by which air can pass through the chamber, a support for supporting an adsorbent plate in the chamber, and at least one porous plate disposed in the chamber to control the air flow through the chamber and over a surface of the adsorbent plate. A sampling apparatus includes a particle counter which has a detector that is operative to count particles of a certain size contained in the air, the particle adsorption device, and a probe by which a sample of air is sequentially or selectively fed to the particle adsorption device and the particle counter. Thus, in a method for use in monitoring a manufacturing environment for potential contamination, particles of a certain size in the air can be counted, and particles in the air can be collected on the surface of the adsorbent plate. The collected particles can be analyzed to determine their shape and composition.

Abstract: A flow indicator comprising a housing and a floater and adapted to draw an air sample is provided. The housing has at least one lower inlet port, an interior space, an upper outlet port, and a transparent window. The floater is disposed inside the housing and is adapted to move substantially vertically in accordance with the flow of the air sample. The floater is also adapted to indicate a flow rate of the air sample.

Abstract: A fluid sampling apparatus and associated fluid analyzer sample process fluids used in semiconductor manufacturing at a plurality of measurement points. The fluid sampling apparatus includes a first nozzle assembly having a plurality of outlet nozzles. The plurality of outlet nozzles are connected to lines supplying the process fluids. A second nozzle assembly is installed above the first nozzle assembly and includes an inlet nozzle connected to an apparatus for measuring a contamination level of the process fluids. A motor is connected to the second nozzle assembly to align a selected outlet nozzle with the inlet nozzle. A pneumatic cylinder is coupled to the first nozzle assembly to connect the selected outlet nozzle with the inlet nozzle. In this manner, it is possible to measure the contamination level of process fluids supplied at a plurality of measurement points by using a single measuring apparatus.

Abstract: Provided is a detector, a gas scrubber comprising the detector for identifying a residual lifetime of an absorbent material contained in a gas scrubber for purifying a harmful exhaust gas, and a method of identifying the residual lifetime of the absorbent material. The detector comprises a solid chemical material, the color of which changes when it comes in contact with the untreated exhaust gas due to loss of absorbing power of the absorbent material, a detection window containing the solid chemical material therein, therethrough the visual identification of the color change of the solid chemical material can be made, and connecting units placed on an upper and lower end of the detection window. The visual identification of the color change of the solid chemical material through the detection window enables the continuous and safe identification of the residual lifetime of the absorbent material and the replacement time, thereby increasing the reliability of the gas scrubber.

Abstract: A fluid sampling apparatus and associated fluid analyzer sample process fluids used in semiconductor manufacturing at a plurality of measurement points. The fluid sampling apparatus includes a first nozzle assembly having a plurality of outlet nozzles. The plurality of outlet nozzles are connected to lines supplying the process fluids. A second nozzle assembly is installed above the first nozzle assembly and includes an inlet nozzle connected to an apparatus for measuring a contamination level of the process fluids. A motor is connected to the second nozzle assembly to align a selected outlet nozzle with the inlet nozzle. A pneumatic cylinder is coupled to the first nozzle assembly to connect the selected outlet nozzle with the inlet nozzle. In this manner, it is possible to measure the contamination level of process fluids supplied at a plurality of measurement points by using a single measuring apparatus.