Abstract: A substrate processing apparatus includes a table in an exposure chamber that is configured to perform an exposure process on a semiconductor substrate, a guiding device including a first horizontal driving body slidably movable in a first horizontal direction and a guide rail on the first horizontal driving body and having a trench extending in a second horizontal direction, a positioning device connected to the guiding device, the positioning device including a slider, a second horizontal driving body and a substrate stage, the slider configured to slidably move in the second horizontal direction along the trench, the second horizontal driving body connected or fixed to the slider, the substrate stage on the second horizontal driving body and configured to support the semiconductor substrate, and a blocking member between the guide rail and the substrate stage to block an inflow of foreign substances onto the substrate stage.

Abstract: Disclosed is a clothes treating apparatus including a drum configured to receive laundry, a tub in which the drum is built, a main body in which the drum and the tub are disposed, detergent drawer compartments provided in the main body to be withdrawn from or inserted in the main body, a spray nozzle configured to spray washing water to the detergent drawer compartments, a water-collecting container disposed below the tub to receive the washing water, a washing line configured to supply the washing water of the water-collecting container to the spray nozzle, a circulation line configured to supply the washing water of the water-collecting container into the drum, and a flow-path conversion pump configured to receive the washing water from the water-collecting container and supply the washing water selectively to the washing line or the circulation line.

Abstract: An extreme ultraviolet (EUV) collector inspection apparatus includes a light blocking cover covering a front surface of an EUV collector to be inspected and providing a space portion in which external light is blocked, a light source in the space portion, the light source having a pillar shape extending along a central axis of the EUV collector, the light source configured to output irradiated light ranging from an ultraviolet (UV) band to a visible light (VIS) band, and a spectrometer above the light source and configured to detect a spectrum of reflected light from the irradiated light reflected from the front surface of the EUV collector. The apparatus or a controller associated therewith may be configured to inspect a contamination state of the front surface of the EUV collector based on the spectrum of reflected light.

Abstract: The present invention relates to a root canal treatment apparatus for cleaning a root canal, a root canal treatment apparatus for charging a root canal, or a root canal treatment apparatus for cleaning and charging a root canal. The root canal treatment apparatus for cleaning a root canal according to the present invention comprises: a storage container for storing a cleaning liquid or a filler supplied from the outside; an ultrasonic oscillator for applying ultrasonic waves to the cleaning liquid or the filler stored in the storage container; an injection port for injecting, around the root canal, the cleaning liquid or the filler to which the ultrasonic waves have been applied in the storage container; and a nozzle having a suction port for sucking the cleaning liquid or bubbles in the root canal or the bubble.

Abstract: A shoe care device includes an inner cabinet that has an accommodation space configured to accommodate shoes therein, an inlet defined at a first portion of the accommodation space and configured to supply air to the accommodation space, and an outlet defined at a second portion of the accommodation space and configured to suction air from the accommodation space. The shoe care device further includes a connection path configured to circulate air between the inlet and the outlet, a blowing fan disposed at the connection path and configured to blow air from the outlet toward the inlet, a dehumidifying material disposed at the connection path and configured to dehumidify the air blown by the blowing fan, a heater configured to heat the dehumidifying material, and a regeneration path configured to guide, to a location other than the inlet, the air having passed through the dehumidifying material heated by the heater.

Abstract: A shoe care device includes an inner cabinet, an air supply device that is configured to blow air to an accommodated space of the inner cabinet and includes a plurality of dehumidifying materials separate from one another, and a controller configured to control the air supply device. The air supply device includes a connection path configured to circulate air between an inlet and an outlet of the inner cabinet, and a regeneration path branched from the connection path and configured to guide air having passed through at least one of the dehumidifying materials to a portion of the air supply device other than the inlet. The controller is configured to control the air supply device to selectively open and close at least one of the connection path or the regeneration path based on whether or not at least one of the dehumidifying materials is heated.

Abstract: A washing machine includes a dewatering shaft for rotating a washing tub, a drive shaft for rotating a pulsator in the washing tub, a coupler configured to move along the dewatering shaft to couple or decouple the drive shaft and the dewatering shaft, a solenoid configured to move the coupler, and a coupler guide configured to be rotated by contact with the coupler or to maintain the coupler in the second position. The coupler includes locking protrusions configured to lock onto an upper side of the coupler guide. The coupler guide includes first guide projections disposed on an outer perimeter of the coupler guide and configured to contact one of the locking protrusions to rotate the coupler guide, and second guide projections disposed opposite to the first guide projections and configured to contact another of the locking protrusions to rotate the coupler guide.

Abstract: Disclosed is a clothes treating apparatus including a drum configured to receive laundry, a tub in which the drum is built, a main body in which the drum and the tub are disposed, detergent drawer compartments provided in the main body to be withdrawn from or inserted in the main body, a spray nozzle configured to spray washing water to the detergent drawer compartments, a water-collecting container disposed below the tub to receive the washing water, a washing line configured to supply the washing water of the water-collecting container to the spray nozzle, a circulation line configured to supply the washing water of the water-collecting container into the drum, and a flow-path conversion pump configured to receive the washing water from the water-collecting container and supply the washing water selectively to the washing line or the circulation line.

Abstract: Disclosed is a clothes treating apparatus including a drum accommodating an object to be dried, a tub including the drum, a first drying duct communicating with an inner side of the drum at one side and an inner side of the tub at the other side, a circulation fan disposed in an end portion of the other side of the first drying duct to circulate air, a spray nozzle disposed between the circulation fan and the drum to spray cooling water to a space between the tub and the drum, a water collecting container disposed below the tub to collect cooling water, a circulation line supplying the cooling water to the spray nozzle, a drainage line discharging the cooling water to outside, and a flow-path conversion pump receiving the cooling water from the water collecting container and supplying the cooling water selectively to the circulation line or the drainage line.

Abstract: Introduced is a flow path conversion pump comprising: an inlet pipe for guiding a flow of water, an impeller housing having an impeller built therein, and including a first housing outlet and a second housing outlet formed parallel to a tangential direction of rotation of the, a flow path switch forming an internal space, including a first switch inlet and a second switch inlet, which communicate with the first housing outlet and the second housing outlet, respectively, and including a first outlet and a second outlet, which communicate with the first switch inlet and the second switch inlet, respectively, a diaphragm disposed in the internal space of the flow path switch, separating the first switch inlet and the second switch inlet, and separating the first outlet and the second outlet and a motor connected to the impeller to transmit power.

Abstract: A washing machine includes a dewatering shaft for rotating a washing tub, a drive shaft for rotating a pulsator in the washing tub, a coupler configured to move along the dewatering shaft to couple or decouple the drive shaft and the dewatering shaft, a solenoid configured to move the coupler, and a coupler guide configured to be rotated by contact with the coupler or to maintain the coupler in the second position. The coupler includes locking protrusions configured to lock onto an upper side of the coupler guide. The coupler guide includes first guide projections disposed on an outer perimeter of the coupler guide and configured to contact one of the locking protrusions to rotate the coupler guide, and second guide projections disposed opposite to the first guide projections and configured to contact another of the locking protrusions to rotate the coupler guide.

Abstract: Provided is a bidirectional pump, including a housing comprising a fluid inlet, and first and second fluid outlets that communicate with the fluid inlet and face each other; an impeller disposed in the housing, and rotating in a forward direction or in a reverse direction; a motor configured to impart a rotating force to the impeller; and a diaphragm disposed between the first and second fluid outlets in the housing, and deformed according to pressure exerted by rotation of the impeller, wherein the diaphragm closes either of the first and second fluid outlets according to a rotating direction of the impeller.

Abstract: The present invention relates to a root canal treatment apparatus for cleaning a root canal, a root canal treatment apparatus for charging a root canal, or a root canal treatment apparatus for cleaning and charging a root canal. The root canal treatment apparatus for cleaning a root canal according to the present invention comprises: a storage container for storing a cleaning liquid or a filler supplied from the outside; an ultrasonic oscillator for applying ultrasonic waves to the cleaning liquid or the filler stored in the storage container; an injection port for injecting, around the root canal, the cleaning liquid or the filler to which the ultrasonic waves have been applied in the storage container; and a nozzle having a suction port for sucking the cleaning liquid or bubbles in the root canal or the bubble.

Abstract: A display device includes: a lower substrate including red, green, and blue pixel units; an upper substrate disposed opposite to the lower substrate; a liquid crystal layer interposed between the lower substrate and the upper substrate; a gate line and a data line disposed on the lower substrate; a thin film transistor connected to the gate line and the data line; red, green, and blue color filters disposed on the red, green, and blue pixel units on the thin film transistor, respectively, to be spaced apart from one another; a neutral color filter interposed between the red, green, and blue color filters and extending along the data line; and a pixel electrode disposed on the red, green, and blue color filters.

Abstract: A method of producing a purified tin, which emits low alpha radiation by using a vacuum refining has developed: the steps are comprising: preparing a crude tin; containing the crude tin in a crucible and placing it in a vacuum furnace; and removing the impurities, which have higher vapor pressures and low boiling points than that of the tin from the vacuum furnace. The impurities, such as a lead and bismuth can be removed as much as possible by utilizing the difference of the vapor pressure of the elements in the tin. It is possible to minimize the emission of alpha radiation, so that it can be prevented the occurrence of the software errors.

Abstract: A method of producing a purified tin, which emits low alpha radiation by using a vacuum refining has developed: the steps are comprising: preparing a crude tin; containing the crude tin in a crucible and placing it in a vacuum furnace; and removing the impurities, which have higher vapor pressures and low boiling points than that of the tin from the vacuum furnace. The impurities, such as a lead and bismuth can be removed as much as possible by utilizing the difference of the vapor pressure of the elements in the tin. It is possible to minimize the emission of alpha radiation, so that it can be prevented the occurrence of the software errors.

Abstract: Disclosed are on-line auction system and an on-line auction method, in which a seller can distribute purchase orders according to the production schedule and can sell the goods at higher prices, and a bidder can receive the goods he wants to purchase at a time he wants. In the auction system and the auction method, if an excessive demand is detected, a seller registers information of goods to be produced and a bidder registers demand information about goods the bidder wants to purchase. When there exists an excessive demand, conducted is an auction, including an order caused the excessive demand and orders still in a waiting state. Then, an order with the lowest bid price is excluded from the auction, while orders in the waiting state after a predetermined time has passed are converted to production-determined orders.