Patents by Inventor Do Jin SEONG

Do Jin SEONG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Micro stage for particle beam column using piezo elements as actuator
    Patent number: 9837245
    Abstract: Disclosed herein is a micro stage using a piezoelectric element that can be reliably operated even in a vacuum environment. In a particle column requiring a high precision, for example, a microelectronic column, the micro stage can be used as a stage with micro or nano degree precision for alignment of parts of the column, or for moving a sample, and so on.
    Type: Grant
    Filed: March 13, 2015
    Date of Patent: December 5, 2017
    Assignee: CEBT CO., LTD.
    Inventors: Ho Seob Kim, Byeng Jin Kim, Do Jin Seong
  • Micro Stage using piezo elements
    Publication number: 20160268929
    Abstract: Disclosed herein is a micro stage using a piezoelectric element that can be reliably operated even in a vacuum environment. In a particle column requiring a high precision, for example, a microelectronic column, the micro stage can be used as a stage with micro or nano degree precision for alignment of parts of the column, or for moving a sample, and so on.
    Type: Application
    Filed: March 13, 2015
    Publication date: September 15, 2016
    Inventors: Ho Seob KIM, Byeng Jin KIM, Do Jin SEONG