Patents by Inventor Do-Ki Chang

Do-Ki Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fluid supplying apparatus and system and method for cleaning thin film using the same
    Patent number: 9943887
    Abstract: A fluid supplying apparatus includes an inner tube having a plurality of holes for distributing a fluid supplied from a supply unit, and an outer tube arranged coaxially or non-coaxially with the inner tube to surround the inner tube and having a plurality of slots for injecting the fluid distributed therein from the holes to the outside. The outer tube substantially has the same length as the inner tube. The fluid supplying apparatus may be used for a thin film cleaning system or method.
    Type: Grant
    Filed: February 15, 2013
    Date of Patent: April 17, 2018
    Assignee: LG CHEM, LTD.
    Inventors: Young Ju Seo, Chae-Ho Chung, Do-Ki Chang, Ki-Kyo Yeom, Ye-Hoon Im, Jae-Min Kim, Kyoung-Hoon Min, Won-Chan Park