Abstract: An apparatus and method for setting zero point of Z-axis in a semiconductor wafer probe station are disclosed. The device includes a base with flat bottom surface; a circuit tester mounted in top portion of the base; and first and second conductive parts attached at either sides of the base, in which two probe leads of the tester are connected therewith, and the first and second conductive parts extending over a bottom portion of the base and being electrically separated on the bottom portion of the base, wherein, when the device is placed on a wafer chuck top area, the first conductive part covers vacuum pins provided in the chuck top and the second conductive part excludes any of the vacuum pins. An output of the circuit tester indicates if the pins and the wafer chuck are level.