Patents by Inventor Do-Seo Ku

Do-Seo Ku has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Automatic discharge apparatus for residual charge on an electrostatic chuck
    Patent number: 6608746
    Abstract: An automatic discharge apparatus for an electrostatic chuck includes a high voltage determining part having an external high voltage determination value supplied thereto. A high voltage generating transformer, electrically connected to an output of the high voltage determining part, generates the high voltage to be supplied to an electrostatic chuck under control of the high voltage determining part. A high voltage controlling part, electrically connected to the high voltage generating transformer and the electrostatic chuck, controls the high voltage supplied from the high voltage generating transformer to the electrostatic chuck in response to an on/off state of power supplied by a power supply. A discharge circuit part electrically connected between the electrostatic chuck and the power supply, forcibly discharges residual voltage remaining in the electrostatic chuck in response to an off state of the power supply.
    Type: Grant
    Filed: March 8, 2001
    Date of Patent: August 19, 2003
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Do-Seo Ku
  • Automatic discharge apparatus for residual charge on an electrostatic chuck
    Publication number: 20020030960
    Abstract: An automatic discharge apparatus for an electrostatic chuck includes a high voltage determining part having an external high voltage determination value supplied thereto. A high voltage generating transformer, electrically connected to an output of the high voltage determining part, generates the high voltage to be supplied to an electrostatic chuck under control of the high voltage determining part. A high voltage controlling part, electrically connected to the high voltage generating transformer and the electrostatic chuck, controls the high voltage supplied from the high voltage generating transformer to the electrostatic chuck in response to an on/off state of power supplied by a power supply. A discharge circuit part electrically connected between the electrostatic chuck and the power supply, forcibly discharges residual voltage remaining in the electrostatic chuck in response to an off state of the power supply.
    Type: Application
    Filed: March 8, 2001
    Publication date: March 14, 2002
    Inventor: Do-Seo Ku