Patents by Inventor Dosoon Kim

Dosoon Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS FOR TREATING SUBSTRATE
    Publication number: 20120305191
    Abstract: Provided is an apparatus for treating a substrate. The apparatus for treating a substrate may include a process chamber having a space formed therein, a chuck positioned in the process chamber and supporting a substrate, a gas supply unit supplying reaction gas into the process chamber, an upper electrode positioned above the chuck and applying high frequency power to the reaction gas, and a heater installed in the upper electrode and heating the upper electrode.
    Type: Application
    Filed: May 30, 2012
    Publication date: December 6, 2012
    Applicant: SEMES CO., LTD.
    Inventors: Sangmin Mun, Dosoon Kim, Daehyun Yang