Abstract: A method of forming a nickel monosilicide layer on silicon-containing features of an electronic device that includes depositing a nickel film over the silicon-containing features. The nickel film is co-deposited with a selected material. The selected material has an atomic percentage in a range of about 10% to 25%. A single anneal step is then applied to the nickel film thus directly forming the nickel monosilicide layer.

Abstract: A method of fabricating a gate electrode for a semiconductor comprising the steps of: providing a substrate; providing on the substrate a layer of a first material of thickness tp, the first material being selected from the group consisting of Si, Si1-x—Gex alloy, Ge and mixtures thereof and a layer of metal of thickness tm; and annealing the layers, such that substantially all of the first material and the metal are consumed during reaction with one another.

Abstract: A method of fabricating a gate electrode for a semiconductor comprising the steps of: providing a substrate; providing on the substrate a layer of a first material of thickness tp, the first material being selected from the group consisting of Si, Si1-x—Gex alloy, Ge and mixtures thereof and a layer of metal of thickness tm; and annealing the layers, such that substantially all of the first material and the metal are consumed during reaction with one another.

Abstract: A method of fabricating a silicide layer on a silicon region of a semiconductor structure, the method comprising the steps of: providing a semiconductor structure having at least one silicon region on a surface thereof; depositing a layer comprising nickel and platinum on the at least one silicon layer; annealing the semiconductor structure and the nickel/platinum layer to react the nickel and the platinum with underlying silicon to form a nickel-platinum silicide, wherein annealing step takes place at temperature of between 680° C. and 720° C.