Patents by Inventor Dominque Janssens

Dominque Janssens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Detecting semiconductor substrate anomalies
    Patent number: 8379964
    Abstract: The present invention is directed to a method for detecting anomalies in a semiconductor substrate comprising the steps of providing a semiconductor substrate, making an inspection image I of the substrate, generating an image K from image I by image processing, generating image B by binarizing image K, and examining image I using image B, characterized in that generating image K comprises multiplying a high-pass convolution filtered image G(I) from image I and a first weight image W1. The present invention is also directed to an apparatus suitable for applying the method.
    Type: Grant
    Filed: August 29, 2008
    Date of Patent: February 19, 2013
    Assignee: KLA-Tencor Corporation
    Inventors: Dominque Janssens, Luc Vanderheydt, Johan DeGreeve, Lieve Govaerts
  • Detecting Semiconductor Substrate Anomalies
    Publication number: 20110123091
    Abstract: The present invention is directed to a method for detecting anomalies in a semiconductor substrate comprising the steps of providing a semiconductor substrate, making an inspection image I of the substrate, generating an image K from image I by image processing, generating image B by binarizing image K, and examining image I using image B, characterized in that generating image K comprises multiplying a high-pass convolution filtered image G(I) from image I and a first weight image W1. The present invention is also directed to an apparatus suitable for applying the method.
    Type: Application
    Filed: August 29, 2008
    Publication date: May 26, 2011
    Applicant: ICOS VISION SYSTEMS NV
    Inventors: Dominque Janssens, Luc Vanderheydt, Johan DeGreeve, Lieve Govaerts