Patents by Inventor Don Curry

Don Curry has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for uniformly etching a dielectric layer
    Patent number: 7316761
    Abstract: Apparatus for plasma etching a layer of material upon a substrate comprising an anode having a first region protruding from a second region, wherein the second region defines a plane and the first region extends from said plane. In one embodiment, at least one solenoid is disposed near the apparatus to magnetize the plasma.
    Type: Grant
    Filed: February 3, 2003
    Date of Patent: January 8, 2008
    Assignee: Applied Materials, Inc.
    Inventors: Kenny L. Doan, Yunsang Kim, Mahmoud Dahimene, Jingbao Liu, Bryan Pu, Hongqing Shan, Don Curry