Patents by Inventor Don O. Rawlings

Don O. Rawlings has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Buffer storage apparatus for semiconductor wafer processing
    Patent number: 4178113
    Abstract: Buffer storage apparatus is disclosed for use with a semiconductor wafer processing system having plurality of processing stations positioned along a conveyor structure and in which allowance must be made for different processing rates at different stations, the buffer storage apparatus including a first buffer storage station positioned between a first and a second processing station for temporarily holding wafers received from the first processing station and then conveying them to the second processing station, and a second buffer station positioned between the second processing station and the third processing station and including means for conveying a wafer received from the second processing station to the third processing station or for temporarily holding it.
    Type: Grant
    Filed: December 5, 1977
    Date of Patent: December 11, 1979
    Assignee: Macronetics, Inc.
    Inventors: Robert I. Beaver, II, Michael J. Adams, George L. Prodanovich, Paul F. Key, Don O. Rawlings, P. Santhanam, Susan L. Hunt