Patents by Inventor Don Yates

Don Yates has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Etchants and etchant systems with plural etch selectivities
    Publication number: 20060102592
    Abstract: An etchant for removing materials with a plurality of selectivities exhibits a first etch selectivity at a first temperature and a second etch selectivity at a second temperature. The etchant may include phosphoric acid, fluoboric acid, or sulfuric acid. The materials that the etchant is configured to remove may include dielectric materials, such as silicon nitride and silicon oxide. The first temperature may be about 175° C. and the second temperature may be about 155° C.
    Type: Application
    Filed: January 4, 2006
    Publication date: May 18, 2006
    Inventors: Li Li, Don Yates