Abstract: A method and system of measuring the size distribution of particles within dilute colloids, for example, through variation of the minimum detected size of aerosolized colloid particles. The method of determining the size distribution of particles in a fluid, involves forming a stream of aerosol droplets of the fluid, the droplets containing particles and dissolved material evaporating the droplets to generate particles, and measuring the concentration of particles by varying a detection threshold. A system or apparatus for determining the size distribution of particles in a fluid, includes a droplet former for forming a stream, of aerosol droplets of the fluid, the droplets containing particles and dissolved material, and a condensation particle detector for evaporating the droplets to generate particles and for measuring the concentration of particles, the condensation particle detector having a variable detection threshold.

Abstract: A method and system of measuring the size distribution of particles within dilute colloids, for example, through variation of the minimum detected size of aerosolized colloid particles. The method of determining the size distribution of particles in a fluid, involves forming a stream of aerosol droplets of the fluid, the droplets containing particles and dissolved material evaporating the droplets to generate particles, and measuring the concentration of particles by varying a detection threshold. A system or apparatus for determining the size distribution of particles in a fluid, includes a droplet former for forming a stream, of aerosol droplets of the fluid, the droplets containing particles and dissolved material, and a condensation particle detector for evaporating the droplets to generate particles and for measuring the concentration of particles, the condensation particle detector having a variable detection threshold.

Abstract: A method and system of measuring the size distribution of particles within dilute colloids, for example, through variation of the minimum detected size of aerosolized colloid particles. The method of determining the size distribution of particles in a fluid, involves forming a stream of aerosol droplets of the fluid, the droplets containing particles and dissolved material, evaporating the droplets to generate particles, and measuring the concentration of particles by varying a detection threshold. A system or apparatus for determining the size distribution of particles in a fluid, includes a droplet former for forming a stream of aerosol droplets of the fluid, the droplets containing particles and dissolved material, and a condensation particle detector for evaporating the droplets to generate particles and for measuring the concentration of particles, the condensation particle detector having a variable detection threshold.

Abstract: A method and apparatus for measuring dissolved residue concentrations and particulate residue particle concentrations and size distribution in liquids, particularly colloidal suspensions. The method involves separating dissolved and particulate residues in liquids for subsequent analysis of the residue species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, detecting and sizing the particles, and determining the liquid volumetric inspection rate. An apparatus for separating dissolved and particulate residues in liquids for determination of the concentrations of the two residue species as well as the size distribution of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting and sizing particles.

Abstract: A method and system of measuring the size distribution of particles within dilute colloids, for example, through variation of the minimum detected size of aerosolized colloid particles. The method of determining the size distribution of particles in a fluid, involves forming a stream of aerosol droplets of the fluid, the droplets containing particles and dissolved material, evaporating the droplets to generate particles, and measuring the concentration of particles by varying a detection threshold. A system or apparatus for determining the size distribution of particles in a fluid, includes a droplet former for forming a stream of aerosol droplets of the fluid, the droplets containing particles and dissolved material, and a condensation particle detector for evaporating the droplets to generate particles and for measuring the concentration of particles, the condensation particle detector having a variable detection threshold.

Abstract: A method and apparatus for measuring particle concentration and size distribution of particles in liquids. The method involve separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, and detecting the particles. An apparatus for separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting particles.

Abstract: An improved method of testing the integrity of a porous filter is provided. The test method is an improvement over a gas-liquid diffusion test wherein the improvement comprises providing a conduit downstream of the filter and filling the conduit with a liquid, the conduit having a length to cross sectional area ratio selected to substantially resist diffusive flow of the gas through the liquid downstream of the filter material.

Abstract: A method and apparatus for measuring dissolved residue concentrations and particulate residue particle concentrations and size distribution in liquids, particularly colloidal suspensions. The method involves separating dissolved and particulate residues in liquids for subsequent analysis of the residue species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, detecting and sizing the particles, and determining the liquid volumetric inspection rate. An apparatus for separating dissolved and particulate residues in liquids for determination of the concentrations of the two residue species as well as the size distribution of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting and sizing particles.

Abstract: A method and apparatus for measuring dissolved residue concentrations and particulate residue particle concentrations and size distribution in liquids, particularly colloidal suspensions. The method involves separating dissolved and particulate residues in liquids for subsequent analysis of the residue species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, detecting and sizing the particles, and determining the liquid volumetric inspection rate. An apparatus for separating dissolved and particulate residues in liquids for determination of the concentrations of the two residue species as well as the size distribution of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting and sizing particles.

Abstract: A method and apparatus for measuring particle concentration and size distribution of particles in liquids. The method involve separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, and detecting the particles. An apparatus for separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting particles.

Abstract: A method and apparatus for measuring particle concentration and size distribution of particles in liquids. The method involve separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, and detecting the particles. An apparatus for separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting particles.

Abstract: A method and apparatus for measuring dissolved residue concentrations and particulate residue particle concentrations and size distribution in liquids, particularly colloidal suspensions. The method involves separating dissolved and particulate residues in liquids for subsequent analysis of the residue species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, detecting and sizing the particles, and determining the liquid volumetric inspection rate. An apparatus for separating dissolved and particulate residues in liquids for determination of the concentrations of the two residue species as well as the size distribution of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting and sizing particles.

Abstract: An improved method of testing the integrity of a porous filter is provided. The test method is an improvement over a gas-liquid diffusion test wherein the improvement comprises providing a conduit downstream of the filter and filling the conduit with a liquid, the conduit having a length to cross sectional area ratio selected to substantially resist diffusive flow of the gas through the liquid downstream of the filter material.

Abstract: A method and apparatus for measuring particle concentration and size distribution of particles in liquids. The method involve separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species. The method includes the steps of forming an aerosol from the liquid sample to be analyzed, evaporating the droplets in the aerosol to dryness, and detecting the particles. An apparatus for separating dissolved and particulate residues in liquids for determination of the size and concentration of the particulate species is also disclosed. The apparatus includes a droplet former, a dryer communicatively connected to the droplet former, and a detector communicatively connected to the evaporator for detecting particles.

Abstract: A dilution apparatus for continuously producing a diluted liquid sample, e.g., a chemical-mechanical polishing slurry, for analysis, e.g., particle size distribution, comprises a mixer manifold, a diluent-introducing means, e.g., a flow controlling device, for introducing a diluent, e.g., water, into the mixer manifold, and a liquid sample introducing means, e.g., a pump, for introducing the sample into the mixer manifold. The mixer manifold includes a plurality of ports for receiving a plurality of liquid samples from a plurality of sample points. The dilution apparatus can include a second mixer manifold for continuously producing a second diluted liquid sample, and it can be associated with one or more sensors operable to measure sample properties, e.g., an optical particle counter. The sensors can be operated simultaneously, and the measurements of the sensors can be compared.

Abstract: A dilution apparatus for continuously producing a diluted liquid sample, e.g., a chemical-mechanical polishing slurry, for analysis, e.g., particle size distribution, comprises a mixer manifold, a diluent-introducing means, e.g., a flow controlling device, for introducing a diluent, e.g., water, into the mixer manifold, and a liquid sample introducing means, e.g., a pump, for introducing the sample into the mixer manifold. The mixer manifold includes a plurality of ports for receiving a plurality of liquid samples from a plurality of sample points. The dilution apparatus can include a second mixer manifold for continuously producing a second diluted liquid sample, and it can be associated with one or more sensors operable to measure sample properties, e.g., an optical particle counter. The sensors can be operated simultaneously, and the measurements of the sensors can be compared.

Abstract: A cleaning solution composition for use on electronic component and equipment employed in the cleaning of these components. The cleaning solution comprises ultrapure water containing carbonic acid plus an oxidizing agent selected from hydrogen peroxide, ozone, and combinations thereof. The invention includes a method of removing contaminants from electronic components, containers and associated equipment using the cleaning solution of novel composition. Further, the invention includes a method of preparing the novel cleaning solution composition by contacting carbon dioxide gas with ultrapure water and adding an oxidizing agent, or by contacting carbon dioxide gas with an ultrapure water solution of oxidizing agent.

Abstract: A chemical blending system for blending two or more constituent chemicals to a desired concentration. One embodiment of the system includes a mix tank, a recirculation line having an inlet and an outlet in the tank, and a pump in the recirculation line for recirculating and mixing the blended chemical. A source of diluent is fluidly coupled to the mix tank through a diluent inlet and supply line. A source of concentrated chemical is fluidly coupled to the recirculation line through a concentrated chemical inlet, supply line, and an adding valve located in the recirculation line between the inlet and pump. A conductivity-type sensor in the recirculation line provides continuous measurements of the blended chemical concentration. A titration analyzer is coupled to the recirculation line to provide periodic blended chemical concentration measurements. A programmable logic control system including a processor and associated memory is coupled to the adding valve, conductivity-type sensor and titration analyzer.

Abstract: A method for qualifying a chemical distribution system and components used therein to ensure that the quantity of contaminants extracted from the system by the chemical is below a predetermined specification level. A volume of the chemical is continuously circulated through the system. The concentrations of extracted contaminants in the chemical are periodically measured, and the contaminant extraction rate determined as a function of the measurements. The system is qualified for production when the extraction rate has decreased to the specification level.

Abstract: A method of recycling and purifying cleaning chemicals used in the production of semiconductor circuits and containing hydrofluoric acid and or hydrochloric acid. Recycling of such chemicals is accomplished using separation and reconstitution steps Hydrofluoric acid and hydrochloric acid cannot be distilled directly from a chemical solution as they form azeotropes with water. A low vapor pressure substance such as sulfuric acid or phosphoric acid is used to break the azeotrope while increasing the purity of the recovered chemicals and decreasing disposal problems. The method is useable at the point of use of the chemicals.