Patents by Inventor Donald Frey

Donald Frey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CMP method for copper, tungsten, titanium, polysilicon, and other substrates using organosulfonic acids as oxidizers
    Publication number: 20050090109
    Abstract: The invention relates to chemical mechanical polishing of substrates using an abrasive and a fluid composition, wherein certain organosulfonic acid compounds are used as oxidizers, and particularly relates to a method of polishing substrates comprising copper, tungsten, titanium, and/or polysilicon using a chemical-mechanical polishing system comprising organosulfonic acids having an electrochemical oxidation potential greater than 0.2V as an oxidizer.
    Type: Application
    Filed: October 23, 2003
    Publication date: April 28, 2005
    Inventors: Melvin Carter, Robert Small, Xiaowei Shang, Donald Frey
  • Particulate or particle-bound chelating agents
    Publication number: 20050076581
    Abstract: The invention generally relates to compositions and methods for chemically mechanically polishing a substrate, including a polishing accelerator, which is normally one or more oxidizers, an abrasive material, and chelating particles and/or metal-absorbent clay material. In addition, the invention can also involve methods of forming chelator particles and methods of separating metal-containing ions from polishing and/or etching solutions after polishing and/or etching.
    Type: Application
    Filed: October 23, 2003
    Publication date: April 14, 2005
    Inventors: Robert Small, Donald Frey, Bruce Tredinnick, Christopher Hayden