Abstract: An improved damascene method of forming a write coil of a magnetic head. The method includes the steps of forming a hard mask layer over an insulator layer; forming a photoresist layer over the hard mask layer; performing an image patterning process to produce a write coil pattern in the photoresist layer; etching to remove portions of the hard mask layer in accordance with the write coil pattern; etching to remove portions of the insulator layer in accordance with the write coil pattern; etching to remove the remaining portion of the etched hard mask layer; after removing the etched hard mask layer, electroplating a material within the etched portion of the insulator material; and performing a chemical-mechanical polishing (CMP) process over the electroplated material. By removing the remainder of the hard mask material before the CMP, the quality of the CMP is improved.

Abstract: A flat vacuum chuck for restraining semiconductor wafer substrates and the like during processing applies a vacuum through holes in the chuck in a timed sequence. The localized areas of the wafer adjacent to each of the holes adhere to the chuck in a pattern that is controlled in such a way so as to minimize any residual gaps therebetween. In one application, the vacuum sequencing pattern is analogous to smoothing a curled sheet of paper on a flat surface with both hands by starting at or near the center of the sheet and moving both hands outward along the surface until the sheet is flat. The vacuum may be applied to substrates to overcome all types of distortions, including symmetrical, asymmetrical, and multi-plane distortions, depending upon the orientation of the net internal stresses resulting from the layers deposited on the wafer. The sequenced application of the vacuum through the chuck holes can be timed by installing a solenoid valve on each of the vacuum tubes connected to the ports.

Abstract: By matching raised hard contact areas on predetermined locations of the actuator/arm/suspension assembly opposite counterpart dedicated tracks or zones, then data track damage can be avoided, otherwise resulting from shock imposed on a disk drive when the disk drive is nonoperational. Such placement permits tradeoffs among the length and power of the error correction code, and the disk area reserved to dedicated tracks or zones.

Abstract: A base casting/cover for a magnetic storage system to minimize the impact of shocks and vibrations to the magnetic storage system. The base casting/cover of the present invention is weakened in the area to which the disk pack spindle shaft is attached, such that the pack bounce frequency and the spindle tilt frequency are separated by 20 Hz or more. The base casting/cover of the present invention is weakened by slits thereon in various configurations about the spindle shaft attachment area. The base casting/cover of the present invention further provides damping of the pack bounce frequency by covering the slits with an adhesive material.