Abstract: In a mass spectrometer system, ions travel through an orifice in an inlet plate into a first vacuum chamber containing AC-only rods, and then through an orifice into a second vacuum chamber containing a standard quadrupole. The second vacuum chamber is held at low pressure, e.g. 0.02 millitorr or less, but the product of the pressure in the first chamber times the length of the AC-only rods is held above 2.25.times.10.sup.-2 torr cm, preferably between 6.times.10.sup.-2 and 15.times.10.sup.-2 torr cm, and the DC voltage between the inlet plate and the AC-only rods is kept low, e.g. between 1 and 30 volts, preferably between 1 and 10 volts. This produces a large enhancement in ion signal, with less focussing aberration and better sensitivity at high masses, and also allows the use of smaller, cheaper pumps so the system can be more easily transportable.

Abstract: A mass analyzer in which an ion signal, typically from a plasma, travels through an orifice into a vacuum chamber, and through a focussing system in the vacuum chamber into a mass spectrometer and ion detector. Drift of the detected ion signal, and differences in drift of the detected ion signal for different elements, are greatly reduced by a small shadow stop placed in the vacuum chamber immediately behind the orifice. The shadow stop and plate containing the orifice are both preferably grounded. The focussing system includes a Bessel box lens, and drift is further reduced by insulating the stop in the Bessel box lens from the barrel and biasing the Bessel stop differently from the barrel.

Abstract: A plasma generated within an induction coil is sampled through a sampler orifice into a first vacuum chamber stage and then through a skimmer orifice into a second vacuum chamber stage for mass analysis of trace ions in the plasma. Arcing at the orifices is reduced or prevented by applying, to the plates containing the orifices, an RF bias voltage derived from the generator which powers the coil. Since optimum ion transmission is highly dependent on the phase and amplitude of the RF bias, phase and amplitude adjustment networks are provided to optimize the ion count. Alternatively, arcing at the sampler orifice can be eliminated by grounding the induction coil at or near its center and the RF bias can be applied only to the plate containing the skimmer orifice.

Abstract: A plasma is generated within an induction coil and the plasma is sampled through an orifice into a vacuum chamber for mass analysis of trace ions in the plasma. Arcing at the orifice is prevented by grounding the induction coil at or near its center, thus eliminating ultraviolet noise and reducing average ion energies and ion energy spread, as well as preventing destruction of the orifice. The elimination of arcing at the orifice allows the use of a sharp edge orifice structure to prevent formation of a cool boundary layer over the orifice and also permits direct sampling of the plasma. The direct sampling and the lack of cooling prevent recombination and reaction of the ions with oxygen and improve the response to elements of high ionization potential, increasing the desired ion signal and greatly reducing the presence of oxides which would otherwise complicate the spectrum.