Abstract: A method of making a probe ring including the steps of providing a substrate, forming the maximum number of traces possible on the substrate, forming the appropriate number of pads on the substrate using the pad mask for making electrical contacts for the semiconductor device, forming appropriate lines of electrical connection between the traces and the pads, and plating the pads to a height to provide adequate clearance between the substrate and the semiconductor device.Additionally disclosed is a method of making a fixed point probe apparatus including providing a probe card having an opening sized and shaped for mating with the probe ring and inserting the ring in the opening.

Abstract: An apparatus for chemically processing an item by submersion in a liquid bath having a means for rotating the item while it is submerged. The means for rotating the item includes a positive displacement continuous-rotation motor capable of submersion in the liquid bath jointly with the item being processed. Operation of the continuous-rotation motor is energized by a flow of pressurized fluid which also serves to exclude the processing liquid chemical from the interior of the motor.

Abstract: Apparatus for use in developing diazo emulsion media (e.g. plates, films, etc.) for use as integrated circuit masks wherein a developing gas is utilized; the apparatus including a developing chamber for housing the media and containing the gas during developing; an accumulator and reservoir for storing the gas when developing is not taking place; a pump for evacuating the developing chamber of air and the developing gas and for pressurizing the gas in the accumulator reservoir; a plurality of solenoid valves for regulating gas flow between the developing chamber, the pump, and the reservoir; and a control unit for automatically controlling the developing process.