Patents by Inventor Donald Jeffrey Thomas

Donald Jeffrey Thomas has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for high-speed transfer and centering of wafer substrates
    Patent number: 6116848
    Abstract: An apparatus for centering and gripping semiconductor wafers. A solenoid is used to actuate two or three curved contacts. Power to the solenoid, and position information from the solenoid is transmitted along a pair of wires. To center the wafer, the solenoid is actuated and the contacts move radially towards the center of the wafer. The contacts grip the edge of the wafer and a pulse-width-modulation signal is used to determine solenoid position as a function of back electromotive force value or waveform. During handling, the contacts hold the wafer such that the wafer does not move relative to the apparatus.
    Type: Grant
    Filed: November 26, 1997
    Date of Patent: September 12, 2000
    Assignee: Brooks Automation, Inc.
    Inventors: Donald Jeffrey Thomas, Martin Peter Aalund, Robert Roy, Michael Risi