Abstract: A chemical reactor includes two or more substrates joined along planar surfaces thereof, a chemical reaction chamber located between the two or more substrates, and a pair of electrodes on one of the substrates and along a wall of the reaction chamber. Each substrate is a substantially dielectric or semiconductor substrate. The chemical reaction chamber has a hollow interior, one or more input ports to transport a gas into the hollow interior, and an output port to transport a byproduct out of the hollow interior.

Abstract: An optoelectronic transducer comprises a unipolar, intraband active region and a micro-cavity resonator. The resonator includes a 2D array of essentially equally spaced regions that exhibits resonant modes. Each of the spaced regions has a depth that extends through the active region and has an average refractive index that is different from that of the active region. The refractive index contrast, the spacing of the spaced regions, and the dimensions of the spaced regions are mutually adapted so that the array acts as a micro-cavity resonator and so that at least one frequency of the resonant modes of the array falls within the spectrum of an optoelectronic parameter of the active region (i.e., the gain spectrum where the transducer is a laser; the absorption spectrum where the transducer is a photodetector). In a first embodiment, the transducer is an ISB laser, whereas in a second embodiment it is a unipolar, intraband photodetector.

Abstract: A micro-miniature x-ray apparatus comprises: a first chip subassembly including a source of x-rays including both Bremsstrahlung photons and characteristic x-rays; a second chip subassembly including a filter for transmitting the characteristic x-rays and blocking the Bremsstrahlung photons; a third chip subassembly including a movable element for focusing or collimating the transmitted characteristic x-rays into a beam and means for controlling the position of the focusing element. In one embodiment, the controlling means include a micro-electromechanical system (MEMS). In another embodiment, the position of the movable element determines how the x-ray beam is steered to the focal area. In still another embodiment, the x-ray source includes a field emitter electron source and a target responsive to the electrons for generating x-rays. In this case, the x-ray beam is also steered by selectively energizing the anode segments.

Abstract: The specification describes a spatial autocorrelation technique for measuring ultrafine linewidths of the order of tens of nanometers and less. Two beams of actinic radiation are used to draw parallel lines in a resist material. Each beam is adjusted to deliver a dose below the threshold for printing a feature, but when combined the dose is sufficient to print a line feature. During exposure the separation between beams is changed in controlled spatial steps until the beams cross one another. During some of the steps at least a portion of the beams will be coincident thus producing printable features. The resist is developed to print the features where the beams are coincident. The lines are below the resolving power of an optical microscope but their presence is discernible. The width of the line is determined from the number of lines printed and the size of the spatial steps.