Patents by Inventor Donald R. Dyer

Donald R. Dyer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of forming thin film patterns by differential pre-baking of resist
    Patent number: 4115120
    Abstract: A method of depositing patterned thin films on an integrated circuit substrate which comprises first forming a layer of positive photoresist material on the substrate and then heating to partially cure the photoresist while maintaining the surface of the photoresist interfacing with the substrate at a lower temperature than the opposite surface of the photoresist which is being exposed to the heat. As a result of this expedient, the upper or exposed portion of the photoresist layer is cured to a greater extent than the lower portion at the interface with the substrate. Then, the photoresist layer is exposed to a selected pattern of light, after which developer for the photoresist material is applied.
    Type: Grant
    Filed: September 29, 1977
    Date of Patent: September 19, 1978
    Assignee: International Business Machines Corporation
    Inventors: Donald R. Dyer, Claude Johnson, Jr., Robert R. Wilbarg