Patents by Inventor Donald R. McKenna

Donald R. McKenna has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5312532
    Abstract: A multi-compartment electroplating system for electroplating two or more objects simultaneously such that the electrodeposited material is substantially uniform in thickness and composition. Electroplating solution is circulated between a reservoir and a multi-compartment tank which has one cathode-paddle-anode (CPA) assembly for each compartment. Each CPA assembly has an anode, a cathode adapted for holding a wafer and employing a single thieving electrode which covers all of the floor of the compartment not covered by the wafer, and a paddle. Also included is a cover which houses a single linear motor for driving all of the paddles in synchrony.
    Type: Grant
    Filed: January 15, 1993
    Date of Patent: May 17, 1994
    Assignee: International Business Machines Corporation
    Inventors: Panayotis Andricacos, Moritz Branger, Robert M. Browne, John O. Dukovic, Benjamin W. B. Fu, Robert W. Hitzfeld, Matteo Flotta, Donald R. McKenna, Lubomyr T. Romankiw, Saeed Sahami