Patents by Inventor Donald Stenabaugh

Donald Stenabaugh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method to reduce the effect of reactive forces on a stage using a balance mass
    Publication number: 20040160132
    Abstract: A system and method are used to levitate and translate a stage within a chamber using a motor assembly coupled to a balance mass assembly. The balance mass assembly is positioned adjacent the chamber. The motor assembly includes a stator and a coil. One of the stator and the coil are coupled to the stage on a first side of a wall of the chamber. The other of the stator and the coil are coupled to the balance mass assembly on a second side of the wall of the chamber. A magnetic assembly coupled to the stage allows the stage to levitate within the chamber. Once levitated, the stage is translated based on the interaction of the magnets and an energized coil.
    Type: Application
    Filed: February 14, 2003
    Publication date: August 19, 2004
    Inventors: Frederick Michael Carter, Donald Stenabaugh
  • System for reducing the effect of reactive forces on a stage using a balance mass
    Publication number: 20040160203
    Abstract: A system and method are used to levitate and translate a stage within a chamber using a motor assembly coupled to a balance mass assembly. The balance mass assembly is positioned adjacent the chamber. The motor assembly includes a stator and a coil. One of the stator and the coil are coupled to the stage on a first side of a wall of the chamber. The other of the stator and the coil are coupled to the balance mass assembly on a second side of the wall of the chamber. A magnetic assembly coupled to the stage allows the stage to levitate within the chamber. Once levitated, the stage is translated based on the interaction of the magnets and an energized coil.
    Type: Application
    Filed: February 17, 2004
    Publication date: August 19, 2004
    Applicant: ASML Holding N.V.
    Inventors: Frederick Michael Carter, Donald Stenabaugh