Abstract: The invention discloses a method of separating a glass mask from a pellicle ring adhesively mounted thereon. This is accomplished by maintaining a coolant in contact with the mask for a period of time sufficient to cool the adhesive bond between the mask and pellicle ring to below its embrittlement temperature so that when a shearing force is applied to the ring with respect to the glass mask will cause shearing of the adhesive bond at the adhesive glass mask interface. When pressure is applied to the ring across the adhesive, separation at the surface of the mask occurs and the ring is released from the mask without damage to the mask or the ring and without leaving significant amounts of adhesive on the surface of the mask. Pellicles removed in this manner can be rebonded at a later time to a glass mask using the same adhesive and without using additional adhesive.