Abstract: A system for laser enhanced voltage contrast using an optical fiber is provided. The system includes a vacuum chamber with a stage that secures a wafer. A laser light source outside the vacuum chamber directs light to an optical fiber. The optical fiber transmits all wavelengths of light from the laser light source into the vacuum chamber through a wall of the vacuum chamber.

Abstract: A system for laser enhanced voltage contrast using an optical fiber is provided. The system includes a vacuum chamber with a stage that secures a wafer. A laser light source outside the vacuum chamber directs light to an optical fiber. The optical fiber transmits all wavelengths of light from the laser light source into the vacuum chamber through a wall of the vacuum chamber.

Abstract: An inspection system and methods in which analog image data values (charges) captured by an image sensor are binned (combined) before or while being transmitted as output signals on the image sensor's output sensing nodes (floating diffusions), and in which an ADC is controlled to sequentially generate multiple corresponding digital image data values between each reset of the output sensing nodes. According to an output binning method, the image sensor is driven to sequentially transfer multiple charges onto the output sensing nodes between each reset, and the ADC is controlled to convert the incrementally increasing output signal after each charge is transferred onto the output sensing node. According to a multi-sampling method, multiple charges are vertically or horizontally binned (summed/combined) before being transferred onto the output sensing node, and the ADC samples each corresponding output signal multiple times. The output binning and multi-sampling methods may be combined.

Abstract: An inspection system and methods in which analog image data values (charges) captured by an image sensor are binned (combined) before or while being transmitted as output signals on the image sensor's output sensing nodes (floating diffusions), and in which an ADC is controlled to sequentially generate multiple corresponding digital image data values between each reset of the output sensing nodes. According to an output binning method, the image sensor is driven to sequentially transfer multiple charges onto the output sensing nodes between each reset, and the ADC is controlled to convert the incrementally increasing output signal after each charge is transferred onto the output sensing node. According to a multi-sampling method, multiple charges are vertically or horizontally binned (summed/combined) before being transferred onto the output sensing node, and the ADC samples each corresponding output signal multiple times. The output binning and multi-sampling methods may be combined.

Abstract: Provided are apparatus and methods for detecting phase defects. The invention relies generally on the distortion of light as it passes through defects in phase shift masks to detect these defects. Light traveling through a defect, such as a bump in an etched area will travel at a different angle than light traveling through air. In order to enhance the signals generated from the defects, the invention in several embodiments provides a multiple element detector having at least four elements, arranged in a radially symmetric configuration. Individual elements of the detector are selected to form a differential signal based on the configuration of pattern lines in the area proximate to the defect. The resulting differential signal is used to generate an image signal and to identify phase defects.

Abstract: Provided are apparatus and methods for detecting phase defects. The invention relies generally on the distortion of light as it passes through defects in phase shift masks to detect these defects. Light traveling through a defect, such as a bump in an etched area will travel at a different angle than light traveling through air. In order to enhance the signals generated from the defects, the invention in several embodiments provides a multiple element detector having at least four elements, arranged in a radially symmetric configuration. Individual elements of the detector are selected to form a differential signal based on the configuration of pattern lines in the area proximate to the defect. The resulting differential signal is used to generate an image signal and to identify phase defects.

Abstract: Provided are apparatus and methods for detecting phase defects. The invention relies generally on the distortion of light as it passes through defects in phase shift masks to detect these defects. Light traveling through a defect, such as a bump in an etched area will travel at a different rate than light traveling through air. In order to enhance the signals generated from the defects, the invention in several embodiments provides a defocused light inspection beam by setting the focus of the beam to a level above or below the photomask subject to inspection. The light from the photomask is collected by a detector split into at least two portions, each generating a signal. A resulting differential signal produced from the signals generated at each of the two detector portions is used to determine whether a defect in the photomask is present, in one embodiment, by generating an image from the resulting signal.

Abstract: A lightwave oven that includes an oven cavity housing enclosing a cooking chamber therein, and first and second pluralities of elongated high power lamps. The oven cavity housing includes a top wall with a first non-planar reflecting surface facing the cooking chamber, a bottom wall with a second non-planar reflecting surface facing the cooking chamber, and a sidewall with a third reflecting surface that surrounds and faces the cooking chamber. The sidewall has a cross-section that is either circular, elliptical, or polygonal having at least five planar sides. The first plurality of elongated high power lamps provide radiant energy in the visible, near-visible and infrared ranges of the electromagnetic spectrum and are disposed adjacent to and along the top wall. The second plurality of elongated high power lamps provide radiant energy in the visible, near-visible and infrared ranges of the electromagnetic spectrum and are disposed adjacent to and along the bottom wall.

Abstract: An lightwave oven and method of cooking therewith for cooking food with radiant energy in the visible, near-visible and infrared ranges of the electromagnetic spectrum from a first plurality of high power lamps positioned above the food and a second plurality of high power lamps positioned below the food. The first plurality of lamps are sequentially operated at a first average power level by applying power thereto in a staggered manner so that not all of the first plurality of lamps are on at the same time, and the second plurality of lamps are sequentially operated at a second average power level by applying power thereto in a staggered manner so that not all of the second plurality of lamps are on at the same time. The stagger can be varied to change the time average power level of the first and/or second pluralities of lamps without adversely affecting the spectral outputs thereof. The first and second pluralities of lamps can be operated in one of several different modes.

Abstract: A lightwave oven and method of cooking therewith that cooks food contained in cookware having a given reflectivity, and automatically changes the lightwave oven cooking sequence to compensate for the reflectivity of the cookware. The lightwave oven includes an oven cavity housing that encloses a cooking region therein. A first plurality and a second plurality of high power lamps provide radiant energy in the visible, near-visible and infrared ranges of the electromagnetic spectrum. The first plurality of lamps is positioned above the cooking region and the second plurality of lamps is positioned below the cooking region. An optical sensor measures an amount of the radiant energy produced by at least one of the second plurality of lamps that is reflected by the cookware in the cooking region. A controller changes an average power level of the second plurality of lamps based upon the amount of radiant energy measured by the optical sensor.

Abstract: A lightwave cooking oven method and apparatus are disclosed wherein a thermistor determines an elevation temperature at a given location on the oven where oven secondary heating has a relation to the cooking time of the food and periodically reducing the power to lamps substantially midway during the normal cooking time at the beginning of which the elevated temperature was determined for a given recipe. The power can be reduced by being turned off or lowered.

Abstract: Quadrature coils for magnetic resonance imaging (MRI apparatus) are in the form of loops constructed of foil bands of conductive material with their respective axes forming an angle with each other to provide the quadrature phase signals. Trapezoidal cutouts are in each loop to allow for entry of the head of a human being or other large specimen. The angle between the coils is adjusted to compensate for the cutouts to provide and maintain the quadrature phase signals. Inductive coupling between the coils is minimized by three rectangular trim foils which are parallel to the main magnetic field and placed adjacent to the coils.

Abstract: A two-dimensional bulk acoustic wave correlator-convolver having an acoustic mirror positioned two focal lengths from an integrated circuit-acoustic transducer array. The image, rather than the Fourier transform, of the input spatial distribution is returned to the transducer array by the mirror.