Abstract: A human-portable MEMS azimuth sensing unit and method that determines the azimuth of a target. There is a spinning support structure, with at least a gyroscope carried by the support structure. The gyroscope has an input axis and an output signal. There is an angle resolver that measures the spin angle of the support structure relative to a reference direction and that has an output signal. Circuitry determines the target azimuth based on the phase difference between the output signals of the gyroscope and the angle resolver. The phase difference can be based on the time between zero crossings of the sinusoidal gyro and angle resolver signals. An accelerometer can also be carried by the support structure, in which case its output can be used to level the unit.

Abstract: A system and method for separating bias instability of MEMS inertial instruments such as gyroscopes or accelerometers from the instrument signal, in which the inertial measurement instrument has an input axis and an output signal, and the bias instability has a frequency. The instrument is rotated about a rotation axis that is orthogonal to the input axis, at a frequency that is greater than the bias instability frequency. The instrument output signal is detected, and demodulated with a phase-sensitive detection method referenced to the instrument rotation.

Abstract: A system and method for separating bias instability of MEMS inertial instruments such as gyroscopes or accelerometers from the instrument signal, in which the inertial measurement instrument has an input axis and an output signal, and the bias instability has a frequency. The instrument is rotated about a rotation axis that is orthogonal to the input axis, at a frequency that is greater than the bias instability frequency. The instrument output signal is detected, and demodulated with a phase-sensitive detection method referenced to the instrument rotation.

Abstract: An inertial measurement unit (IMU) for a spinning aerial vehicle that spins about a spin axis having a substrate defining a plane, the substrate fixed to the vehicle with the plane essentially orthogonal to the spin axis so that the substrate spins about the spin axis as the vehicle does, at least one generally planar gyroscope coupled to the substrate, the gyroscope defining a gyro input axis that is essentially parallel to the plane and generating a gyro output signal, at least one generally planar accelerometer coupled to the substrate, the accelerometer defining an accelerometer input axis that is essentially parallel to the plane and generating an accelerometer output signal, and a system for demodulating the gyro output signal with a phase-sensitive demodulation referenced to the accelerometer output signal. Also featured is a method of providing guidance information for a spinning aerial vehicle that spins about a spin axis using the described system.

Abstract: A planar MEMS accelerometer that detects acceleration along an input axis that is orthogonal to the plane. There are spaced bonding pads coupled to a substrate. A generally planar Servo Member (SM) is flexibly coupled to the bonding pads by servo member flexures such that the SM is capable of oscillatory motion about a servo axis that is orthogonal to the plane. A generally planar plate Torque Summing Member (TSM) is located within, coplanar with, and flexibly coupled to the SM such that the TSM is capable of rotational motion about an output axis that is in the plane and orthogonal to the servo axis. The TSM is mass-imbalanced relative to the output axis. A generally planar plate rotor is located within, coplanar with, and flexibly coupled to the TSM such that it is capable of rotary oscillatory motion relative to the TSM about a rotor axis that is in the plane. Rotor drives directly oscillate the rotor about the rotor axis at a rotor oscillation frequency and amplitude.

Abstract: A gyroscope that lies generally in a plane, for detecting rotation rate about a gyro input axis. The gyroscope has a substrate, and a generally planar outer member flexibly coupled to the substrate such that it is capable of oscillatory motion about a drive axis that is orthogonal to the input axis. There is also a generally planar inner member coplanar with and flexibly coupled to the outer member such that it is capable of rotary oscillatory motion relative to the outer member about an output axis that is orthogonal to the plane of the members. There are one or more drives for directly or indirectly oscillating the outer member about the drive axis, and one or more sensors that detect oscillation of the inner member about the output axis.

Abstract: A system and method for damping undesired motion of a suspended structure that is connected by one or more flexures that have an elastic limit to a fixed structure in a MEMS sensor, wherein the undesired motion is caused by a high G acceleration pulse. At one or more of before and during a high G acceleration pulse that could move the suspended structure beyond the elastic limit of a flexure, the system actively generates an attractive force that acts to counteract motion of the suspended structure caused by the high G acceleration pulse, so as to maintain motion of the suspended structure within the elastic limit of the flexure.

Abstract: An inertial instrument such as an accelerometer or gyroscope having scale factor functionality, and that lies generally in a plane. The gyro detects rotation rate about a gyro input axis. The gyroscope has a substrate, a generally planar scale factor gimbal flexibly coupled to the substrate such that it is capable of oscillatory motion about the input axis, a generally planar support member coplanar with and flexibly coupled to the scale factor gimbal such that the support member is capable of oscillatory motion about a drive axis that is orthogonal to the input axis, and a generally planar gyro member coplanar with and flexibly coupled to the support member such that it is capable of rotary oscillatory motion relative to the support member about an output axis that is orthogonal to the plane of the members. There are one or more first drives for oscillating the support member about the drive axis, and one or more second drives for oscillating the scale factor gimbal about the input axis.

Abstract: An inertial instrument such as an accelerometer or gyroscope having scale factor functionality, and that lies generally in a plane. The gyro detects rotation rate about a gyro input axis. The gyroscope has a substrate, a generally planar scale factor gimbal flexibly coupled to the substrate such that it is capable of oscillatory motion about the input axis, a generally planar support member coplanar with and flexibly coupled to the scale factor gimbal such that the support member is capable of oscillatory motion about a drive axis that is orthogonal to the input axis, and a generally planar gyro member coplanar with and flexibly coupled to the support member such that it is capable of rotary oscillatory motion relative to the support member about an output axis that is orthogonal to the plane of the members. There are one or more first drives for oscillating the support member about the drive axis, and one or more second drives for oscillating the scale factor gimbal about the input axis.

Abstract: A gyroscope for detecting rotation about a gyro input axis, having a support structure, at least one mass flexibly coupled to the support structure such that it is capable of motion in two directions along a drive axis, the mass offset from the gyro output axis, one or more drives for oscillating the flexibly-coupled masses along the drive axis, one or more mass motion sensors that sense motion of the flexibly-coupled masses along their drive axes, and one or more gyro output sensors that detect rotation of the support structure about the output axis.

Abstract: A system and method for separating bias instability of MEMS inertial instruments such as gyroscopes or accelerometers from the instrument signal, in which the inertial measurement instrument has an input axis and an output signal, and the bias instability has a frequency. The instrument is oscillated about an oscillation axis that is orthogonal to the input axis, at a frequency that is greater than the bias instability frequency. The instrument output signal is detected, and demodulated with a phase-sensitive detection method referenced to the instrument rotation.

Abstract: A gyroscope that lies generally in a plane, for detecting rotation rate about a gyro input axis. The gyroscope has a substrate, and a generally planar outer member flexibly coupled to the substrate such that it is capable of oscillatory motion about a drive axis that is orthogonal to the input axis. There is also a generally planar inner member coplanar with and flexibly coupled to the outer member such that it is capable of rotary oscillatory motion relative to the outer member about an output axis that is orthogonal to the plane of the members. There are one or more drives for directly or indirectly oscillating the outer member about the drive axis, and one or more sensors that detect oscillation of the inner member about the output axis.

Abstract: An accelerometer that lies generally in a plane, for detecting acceleration along an input axis. There is a substrate, a generally planar Servo Member (SM) flexibly coupled to the substrate such that it is capable of oscillatory motion about a servo axis that lies in the plane, a generally planar Torque Summing Member (TSM) coplanar with and flexibly coupled to the SM such that the TSM is capable of rotary motion relative to the SM about an output axis that is in the plane and orthogonal to the servo axis, wherein the TSM is mass-imbalanced relative to the output axis, and a generally planar rotor coplanar with and flexibly coupled to the TSM such that it is capable of rotary oscillatory motion relative to the TSM about a rotor axis that is orthogonal to the plane of the members. There are drives for oscillating the rotor about the rotor axis and for oscillating the SM about the servo axis. Output sensors detect oscillation of the rotor about the rotor axis and of the SM about the servo axis.

Abstract: An accelerometer that lies generally in a plane, for detecting acceleration along an input axis. There is a substrate, a generally planar Servo Member (SM) flexibly coupled to the substrate such that it is capable of oscillatory motion about a servo axis that lies in the plane, a generally planar Torque Summing Member (TSM) coplanar with and flexibly coupled to the SM such that the TSM is capable of rotary motion relative to the SM about an output axis that is in the plane and orthogonal to the servo axis, wherein the TSM is mass-imbalanced relative to the output axis, and a generally planar rotor coplanar with and flexibly coupled to the TSM such that it is capable of rotary oscillatory motion relative to the TSM about a rotor axis that is orthogonal to the plane of the members. There are drives for oscillating the rotor about the rotor axis and for oscillating the SM about the servo axis. Output sensors detect oscillation of the rotor about the rotor axis and of the SM about the servo axis.

Abstract: A gyroscope that lies generally in a plane, for detecting rotation rate about a gyro input axis. The gyroscope has a substrate, and a generally planar support member flexibly coupled to the substrate such that it is capable of oscillatory motion about a drive axis that is orthogonal to the input axis. There is also a generally planar gyro member coplanar with and flexibly coupled to the support member such that it is capable of rotary oscillatory motion relative to the support member about an output axis that is orthogonal to the plane of the members. There are one or more drives for directly or indirectly oscillating the gyro member about the drive axis, and one or more gyro output sensors that detect oscillation of the gyro member about the output axis.

Abstract: Three magnetic substrates are provided, the first substrate forms the rotor and the other two form the outer stator. A series of spaced concentric grooves and spaced spiral grooves are formed in the central region of both faces of the first substrate. A hole is placed at the center of the spiral grooves, and filled with magnetic material. A conductor is then deposited into the spiral grooves, forming a central wheel. A series of spaced serpentine grooves and generally radial grooves are formed on each active face of the other two substrates. A conductor is then deposited into the serpentine grooves, and a magnetic material is deposited into the generally radial grooves. The two outer substrates are then bonded against the first substrate such that the outer end of each magnetic path overlays a filled hole in the first substrate, creating the stator of an axial air gap reluctance motor.

Abstract: A system and method for separating bias instability of MEMS inertial instruments such as gyroscopes or accelerometers from the instrument signal, in which the inertial measurement instrument has an input axis and an output signal, and the bias instability has a frequency. The instrument is oscillated about an oscillation axis that is orthogonal to the input axis, at a frequency that is greater than the bias instability frequency. The instrument output signal is detected, and demodulated with a phase-sensitive detection method referenced to the instrument rotation.

Abstract: A gyroscope that lies generally in a plane, for detecting rotation rate about a gyro input axis. The gyroscope has a substrate, and a generally planar support member flexibly coupled to the substrate such that it is capable of oscillatory motion about a drive axis that is orthogonal to the input axis. There is also a generally planar gyro member coplanar with and flexibly coupled to the support member such that it is capable of rotary oscillatory motion relative to the support member about an output axis that is orthogonal to the plane of the members. There are one or more drives for directly or indirectly oscillating the gyro member about the drive axis, and one or more gyro output sensors that detect oscillation of the gyro member about the output axis.

Abstract: This invention relates to the fabrication of planar inductive components whereby the design in cross-section describes a conductor surrounded by magnetic material along the length of the conductor; an electrical insulator is placed between the conductor and the magnetic material. Cases also apply where more than one independent conductor is used. The planar form allows integration of inductive components with integrated circuits. These inductive components can be embedded in other materials. They can also be fabricated directly onto parts.

Abstract: A rate gyroscope and accelerometer multisensor, and a process for fabricating the device. The device has an inner magnetically-suspended spinning wheel rotor, with outer stator portions adjacent both faces of the rotor. In one embodiment of the process, three substrates of magnetic material are provided. A first substrate is used to form the portion comprising the rotor. The other two substrates are used to form the outer stator portions. A series of spaced concentric grooves are formed in the central region of both faces of the first substrate. Outside of the grooves on both faces of the first substrate a series of spaced spiral grooves are formed. A hole is placed at the center of the spiral grooves, and filled with magnetic material. A conductor is then deposited into the spiral grooves. A central wheel is formed, the wheel carrying the spaced concentric grooves and defining along its edge a series of spaced teeth.