Patents by Inventor Dong Been HUH

Dong Been HUH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE PROCESSING APPARATUS
    Publication number: 20230005712
    Abstract: In accordance with an exemplary embodiment of the present invention, an apparatus for processing substrate comprising: a support plate; an antenna disposed in parallel to one surface of the support plate and having 1st to n-th turns (n=an integer greater than 3) wound along one direction from an inner end; and a distance control unit capable of adjusting separation distances formed between the 1st to n-th turns.
    Type: Application
    Filed: November 19, 2020
    Publication date: January 5, 2023
    Applicant: EUGENE TECHNOLOGY CO., LTD.
    Inventors: Yong Ki KIM, Yang Sik SHIN, Dong Been HUH, Tae Ho LEE