Abstract: A substrate processing method is provided. The substrate processing method comprises loading a substrate onto a substrate support inside a chamber, forming a plasma inside the chamber, providing a first DC pulse signal to an electromagnet that generates a magnetic field inside the chamber and processing the substrate with the plasma, wherein the first DC pulse signal is repeated at a first period including a first section and a second section subsequent to the first section, the first DC pulse signal has a first level during the first section, and the first DC pulse signal has a second level different from the first level during the second section.

Abstract: The present invention relates to an automatic pill counting and packaging apparatus which may automatically count and package pills into a pouch having a sealable inlet. The automatic pill counting and packaging apparatus includes a bottom transfer part for supplying a pouch, a top transfer part disposed at an upper portion of the bottom transfer part for supplying pills, a counting part for counting the pills supplied by the top transfer part, and a packing part for inputting and packing the pills supplied by the top transfer part into the pouch supplied by the bottom transfer part.