Abstract: Provided is a feeding block for transferring a process gas to a process chamber, the feeding block including a body, a first annular channel provided in the body, at least one first supply channel extending from an outer surface of the body to the first annular channel to supply a first process gas to the first annular channel, and at least one first discharge channel extending from the first annular channel to an outer surface of the body to discharge the first process gas in the first annular channel to an outside, wherein the body is provided as a single member such that the first supply channel, the first annular channel, and the first discharge channel have continuous inner surfaces.

Abstract: A substrate support includes a disk having a disk shape to support at least one substrate, at least one pocket groove which is formed to be concave from an upper surface of the disk in a shape corresponding to the substrate such that at least an edge portion of the substrate is seated therein, a free space forming portion which is spaced inwardly at a predetermined distance from an edge of the pocket groove and formed to be concave from at least a part of a bottom surface of the pocket groove so as to define a stepped portion that supports at least the edge portion of the substrate and forms a free space below the substrate when the substrate is seated on the stepped portion, and an exhaust passage which connects an outer circumferential surface of the disk to at least a part of the free space forming portion.