Patents by Inventor Dongchoon Suh

Dongchoon Suh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for determining a substrate exchange position in a processing system
    Patent number: 7505832
    Abstract: Embodiments of a method and apparatus for determining a substrate exchange position in a processing system are provided. In one embodiment, a method of determining a substrate exchange position in a processing system includes determining an initial exchange position within a processing chamber, and resolving a change in the exchange position. The step of resolving may further include the step of sensing a change in temperature of a facet of a transfer chamber having the processing chamber coupled thereto, sensing a change in a state of the system, or sensing a change in position of the processing chamber, among others.
    Type: Grant
    Filed: March 16, 2004
    Date of Patent: March 17, 2009
    Assignee: Applied Materials, Inc.
    Inventors: Dongchoon Suh, Akihiro Hosokawa, Hung The Nguyen
  • Slit valve method and apparatus
    Patent number: 7007919
    Abstract: An actuator assembly for a slit valve door is configured to maintain a slit valve in a closed condition notwithstanding a high pressure differential between adjacent chambers that the slit valve isolates from each other. The slit valve door actuator assembly includes an actuator which moves the slit valve door between open and closed positions, and a locking mechanism to keep the slit valve door in a position to seal the slit valve in resistance to high gas pressure against the slit valve door. The locking mechanism may include a hard stop which is selectively movable into position to block retracting movement of the slit valve door.
    Type: Grant
    Filed: April 17, 2003
    Date of Patent: March 7, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Wendell Blonigan, Emanuel Beer, Dongchoon Suh, Jaime Munoz, Sam H. Kim
  • Substrate storage cassette with substrate alignment feature
    Patent number: 6916147
    Abstract: A substrate storage cassette and a method of orienting a substrate disposed therein are provided. In one embodiment, the substrate storage cassette includes a plurality of flanges pairs disposed between a first lateral sidewall coupled in a spaced-apart relation to a second lateral sidewall. Each of the flange pairs adapted to support a substrate thereon. At least a first alignment feature disposed between the flange pair and adapted to mate with an orientation feature of the substrate when the substrate is in a predefined orientation.
    Type: Grant
    Filed: October 25, 2002
    Date of Patent: July 12, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Dongchoon Suh, Wendell T. Blonigan, Rolf A. Guenther
  • Method and apparatus for determining a substrate exchange position in a processing system
    Publication number: 20040230341
    Abstract: Embodiments of a method and apparatus for determining a substrate exchange position in a processing system are provided. In one embodiment, a method of determining a substrate exchange position in a processing system includes determining an initial exchange position within a processing chamber, and resolving a change in the exchange position. The step of resolving may further include the step of sensing a change in temperature of a facet of a transfer chamber having the processing chamber coupled thereto, sensing a change in a state of the system, or sensing a change in position of the processing chamber, among others.
    Type: Application
    Filed: March 16, 2004
    Publication date: November 18, 2004
    Applicant: Applied Materials, Inc.
    Inventors: Dongchoon Suh, Akihiro Hosokawa, Hung The Nguyen
  • Slit valve method and apparatus
    Publication number: 20040206921
    Abstract: An actuator assembly for a slit valve door is configured to maintain a slit valve in a closed condition notwithstanding a high pressure differential between adjacent chambers that the slit valve isolates from each other. The slit valve door actuator assembly includes an actuator which moves the slit valve door between open and closed positions, and a locking mechanism to keep the slit valve door in a position to seal the slit valve in resistance to high gas pressure against the slit valve door. The locking mechanism may include a hard stop which is selectively movable into position to block retracting movement of the slit valve door.
    Type: Application
    Filed: April 17, 2003
    Publication date: October 21, 2004
    Applicant: Applied Materials, Inc.
    Inventors: Wendell Blonigan, Emanuel Beer, Dongchoon Suh, Jaime Munoz, Sam H. Kim
  • Substrate storage cassette with substrate alignment feature
    Publication number: 20040081547
    Abstract: A substrate storage cassette and a method of orienting a substrate disposed therein are provided. In one embodiment, the substrate storage cassette includes a plurality of flanges pairs disposed between a first lateral sidewall coupled in a spaced-apart relation to a second lateral sidewall. Each of the flange pairs adapted to support a substrate thereon. At least a first alignment feature disposed between the flange pair and adapted to mate with an orientation feature of the substrate when the substrate is in a predefined orientation.
    Type: Application
    Filed: October 25, 2002
    Publication date: April 29, 2004
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Dongchoon Suh, Wendell T. Blonigan, Rolf A. Guenther