Patents by Inventor Dong Gap SHIN

Dong Gap SHIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR MONITORING SUBSTRATE, METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME, AND SUBSTRATE PROCESS SYSTEM USING THE SAME
    Publication number: 20230115922
    Abstract: A method for fabricating a semiconductor device includes loading a substrate into a process chamber, processing the substrate in the process chamber, using a plasma generated inside the process chamber, receiving a plasma light emitted from the plasma, selecting a target light from the plasma light, such that the target light is related to a surface condition of the substrate, and analyzing an intensity of the target light over time to monitor the surface condition of the substrate.
    Type: Application
    Filed: May 20, 2022
    Publication date: April 13, 2023
    Inventors: Yong In LEE, In Hwa BAEK, Se-Hoon JANG, Dong Gap SHIN, Young Ho KIM, Seung Dae SEOK, Si Woong WOO, Jun Gyu LEE