Abstract: Proposed is a POD cleaning process including: separating an introduced POD into an inner POD and an outer POD; cleaning a separation POD, which results from the separation, within a cleaning sub-chamber; drying the separation POD, which undergoes the cleaning, within a drying chamber; vacuum-processing the separation POD undergoing the drying; and assembling the inner POD and the outer POD that undergo the vacuum processing, in which the cleaning and the drying are separately performed.

Abstract: Proposed is a POD cleaning chamber including: a cleaning sub-chamber including an entrance door and accommodating and cleaning a separation POD being transported, the separation POD resulting from separating a POD; a drying chamber including an exit door and drying the separations POD transferred from the cleaning sub-chamber; a shutter being arranged between the cleaning sub-chamber and the drying chamber, the shutter being configured to ascend and descend; and a chamber moving mechanism transporting the separation POD from the cleaning sub-chamber to the drying chamber.

Abstract: Proposed is A POD cleaning apparatus including: a separate unit separating a POD introduced through an introducing inlet; a first transportation unit transporting a separation POD resulting from the separation in the separation unit; a plurality of cleaning chambers in each of which the separation POD transported by the first transportation unit is cleaned and dried; a chamber in which the separation POD dried in the cleaning chamber is vacuum-processed; a second transportation transporting the separation dried in the cleaning chamber to the vacuum chamber; and an assembly unit assembling the vacuum-processed separation PODs, in which each of the plurality of cleaning chambers includes: a cleaning sub-chamber where the separation POD transported by the first transportation unit is accommodated and cleaned; and a drying chamber where the separation POD transported from the cleaning sub-chamber is dried, and in which the cleaning sub-chamber and the drying chamber are spatially separated.

Abstract: Proposed is a POD cleaning chamber including: a cleaning sub-chamber including an entrance door and accommodating and cleaning a separation POD being transported, the separation POD resulting from separating a POD; a drying chamber including an exit door and drying the separations POD transferred from the cleaning sub-chamber; a shutter being arranged between the cleaning sub-chamber and the drying chamber, the shutter being configured to ascend and descend; and a chamber moving mechanism transporting the separation POD from the cleaning sub-chamber to the drying chamber.

Abstract: Proposed is a POD cleaning process including: separating an introduced POD into an inner POD and an outer POD; cleaning a separation POD, which results from the separation, within a cleaning sub-chamber; drying the separation POD, which undergoes the cleaning, within a drying chamber; vacuum-processing the separation POD undergoing the drying; and assembling the inner POD and the outer POD that undergo the vacuum processing, in which the cleaning and the drying are separately performed.

Abstract: An embodiment of the present subject matter including a FOUP body and a FOUP cover includes: a loading and unloading part configured to load or unload the FOUP; a standby part which is provided at one side of the loading and unloading part and on which the FOUP body and the FOUP cover are separated from or coupled to each other; a cleaning chamber configured to clean the FOUP body and the FOUP cover using steam; and a robot configured to transport the FOUP body and the FOUP cover between the standby part and the cleaning chamber.

Abstract: The present invention is directed to providing a front opening unified pod (FOUP) cleaning device capable of improving cleaning and drying efficiency for a FOUP body and a FOUP cover and a FOUP cleaning method. To this end, the FOUP cleaning device for cleaning a FOUP including a FOUP body and a FOUP cover includes: a loading and unloading part configured to load or unload the FOUP; a standby part which is provided at one side of the loading and unloading part and on which the FOUP body and the FOUP cover are separated from or coupled to each other; a cleaning chamber configured to clean the FOUP body and the FOUP cover using steam; and a robot configured to transport the FOUP body and the FOUP cover between the standby part and the cleaning chamber.