Patents by Inventor Dong Gon WOO

Dong Gon WOO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pellicle holder, pellicle inspection apparatus, and pellicle inspection method
    Patent number: 11137693
    Abstract: Provided is a pellicle holder. The pellicle holder includes: an outer frame formed therein with a pellicle seating space; and a plurality of holding legs extending in a direction from the outer frame toward a center of the pellicle seating space, wherein the holding leg is extended or contracted in the extension direction and has one end on which a portion of a pellicle is mounted to support the pellicle.
    Type: Grant
    Filed: November 21, 2019
    Date of Patent: October 5, 2021
    Assignees: IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY), FOUNDATION HANYANG UNIVERSITY) Seoul, R
    Inventors: Jin Ho Ahn, Young Woong Kim, Dong Gon Woo
  • EUV pellicle structure and method for manufacturing same
    Patent number: 10962876
    Abstract: A method for manufacturing an extreme ultraviolet (EUV) pellicle structure may include preparing a pellicle membrane that includes an intermediate layer structure in which EUV transmission layers and heat dissipation layers are alternately stacked, a first thin layer disposed on a top surface of the intermediate layer structure, and a second thin layer disposed on a bottom surface of the intermediate layer structure and having a heat emissivity lower than that of the first thin layer, and disposing a cooling structure for absorbing heat from the pellicle membrane on an edge sidewall of the pellicle membrane at which the heat dissipation layers are exposed.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: March 30, 2021
    Assignee: IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY)
    Inventors: Jin Ho Ahn, Jung Hwan Kim, Jung Sik Kim, Dong Gon Woo, Yong Ju Jang
  • PELLICLE HOLDER, PELLICLE INSPECTION APPARATUS, AND PELLICLE INSPECTION METHOD
    Publication number: 20200174376
    Abstract: Provided is a pellicle holder. The pellicle holder includes: an outer frame formed therein with a pellicle seating space; and a plurality of holding legs extending in a direction from the outer frame toward a center of the pellicle seating space, wherein the holding leg is extended or contracted in the extension direction and has one end on which a portion of a pellicle is mounted to support the pellicle.
    Type: Application
    Filed: November 21, 2019
    Publication date: June 4, 2020
    Applicant: IUCF-HYU(INDUSTRY-UNIVERSITY COOPORATION FOUNDATION HANYANG UNIVERSITY)
    Inventors: Jin Ho AHN, Young Woong KIM, Dong Gon WOO
  • EUV PELLICLE STRUCTURE AND METHOD FOR MANUFACTURING SAME
    Publication number: 20180348626
    Abstract: A method for manufacturing an extreme ultraviolet (EUV) pellicle structure may include preparing a pellicle membrane that includes an intermediate layer structure in which EUV transmission layers and heat dissipation layers are alternately stacked, a first thin layer disposed on a top surface of the intermediate layer structure, and a second thin layer disposed on a bottom surface of the intermediate layer structure and having a heat emissivity lower than that of the first thin layer, and disposing a cooling structure for absorbing heat from the pellicle membrane on an edge sidewall of the pellicle membrane at which the heat dissipation layers are exposed.
    Type: Application
    Filed: July 26, 2018
    Publication date: December 6, 2018
    Applicant: IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATI ON HANYANG UNIVERSITY)
    Inventors: Jin Ho AHN, Jung Hwan KIM, Jung Sik KIM, Dong Gon WOO, Yong Ju JANG