Abstract: Disclosed herein is an apparatus for storing and handling an article at a ceiling, including: an internal rail configured to hang on the ceiling; a storage system configured to hang on the ceiling and including a shelf of a first row and a shelf of a second row disposed on both sides of the internal rail to face each other and a transport in/out port connected to any one of the shelf of the first row and the shelf of the second row; and an internal transfer robot configured to be movably connected to the internal rail and convey the article between any one of the shelf of the first row and the shelf of the second row and the transport in/out port.

Abstract: Disclosed herein is a robot for transferring an article: a body configured to be moved while hanging on a moving rail; a holding unit configured to hold the article; a two-way sliding unit configured to be connected to the holding unit and slide the holding unit to both sides of the body; and an elevation-driving unit configured to be installed at the body and connected to the two-way sliding unit to elevate the two-way sliding unit along a height direction of the body.

Abstract: Disclosed herein is an apparatus for storing and handling an article at a ceiling, including: an internal rail configured to hang on the ceiling; a storage system configured to hang on the ceiling and including a shelf of a first row and a shelf of a second row disposed on both sides of the internal rail to face each other and a transport in/out port connected to any one of the shelf of the first row and the shelf of the second row; and an internal transfer robot configured to be movably connected to the internal rail and convey the article between any one of the shelf of the first row and the shelf of the second row and the transport in/out port.

Abstract: Disclosed herein is an apparatus for storing and handling an article at a ceiling, including: an internal rail configured to hang on the ceiling; a storage system configured to hang on the ceiling and including a shelf of a first row and a shelf of a second row disposed on both sides of the internal rail to face each other and a transport in/out port connected to any one of the shelf of the first row and the shelf of the second row; and an internal transfer robot configured to be movably connected to the internal rail and convey the article between any one of the shelf of the first row and the shelf of the second row and the transport in/out port.

Abstract: Provided is an apparatus of an inhalation type for stocking a wafer at a ceiling and an inhaling type wafer stocking system having the same including a stocking system having a shelf that is fixed to a ceiling and supports a container in which a wafer is present; and an inhalation assembly that is installed in the stocking system so as to correspond to the shelf and is configured so as to inhale gas that leaks from the container.

Abstract: A method for supplying inert gas to a side track buffer (STB) in a semiconductor wafer production system includes a step of sensing that a front opening unified POD (FOUP) is loading on the STB and generating a first input signal, and a step of opening a valve for inert gas and supplying nitrogen gas to the FOUP based on the first input signal, and to a semiconductor wafer production system using the method.

Abstract: Disclosed herein is a robot for transferring an article: a body configured to be moved while hanging on a moving rail; a holding unit configured to hold the article; a two-way sliding unit configured to be connected to the holding unit and slide the holding unit to both sides of the body; and an elevation-driving unit configured to be installed at the body and connected to the two-way sliding unit to elevate the two-way sliding unit along a height direction of the body.

Abstract: Disclosed herein is an apparatus for storing and handling an article at a ceiling, including: an internal rail configured to hang on the ceiling; a storage system configured to hang on the ceiling and including a shelf of a first row and a shelf of a second row disposed on both sides of the internal rail to face each other and a transport in/out port connected to any one of the shelf of the first row and the shelf of the second row; and an internal transfer robot configured to be movably connected to the internal rail and convey the article between any one of the shelf of the first row and the shelf of the second row and the transport in/out port.

Abstract: Provided is an apparatus of an inhalation type for stocking a wafer at a ceiling and an inhaling type wafer stocking system having the same including a stocking system having a shelf that is fixed to a ceiling and supports a container in which a wafer is present; and an inhalation assembly that is installed in the stocking system so as to correspond to the shelf and is configured so as to inhale gas that leaks from the container.

Abstract: The present invention relates to a method for supplying inert gas to an STB in a semiconductor wafer production system that includes a step of sensing that a FOUP is loading on the STB and generating a first input signal, and a step of opening a valve for inert gas and supplying nitrogen gas to the FOUP based on the first input signal, and to a semiconductor wafer production system using the method.