Patents by Inventor Dong Hoon KUK

Dong Hoon KUK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pattern analysis system and method of manufacturing semiconductor device using the same
    Patent number: 12062164
    Abstract: A method of manufacturing a semiconductor device that includes providing a substrate having a pattern formed thereon. A scanning electron microscope (SEM) image is generated that includes a boundary image showing an edge of the pattern. A blended image is generated by performing at least one blending operation on the SEM image and a background image aligned with the boundary image. Contour data is generated by binarizing the blended image on a basis of a threshold value. The threshold value is determined by a critical dimension of the pattern.
    Type: Grant
    Filed: December 10, 2021
    Date of Patent: August 13, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Min-Cheol Kang, Dong Hoon Kuk
  • PATTERN ANALYSIS SYSTEM AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
    Publication number: 20220207699
    Abstract: A method of manufacturing a semiconductor device that includes providing a substrate having a pattern formed thereon. A scanning electron microscope (SEM) image is generated that includes a boundary image showing an edge of the pattern. A blended image is generated by performing at least one blending operation on the SEM image and a background image aligned with the boundary image. Contour data is generated by binarizing the blended image on a basis of a threshold value. The threshold value is determined by a critical dimension of the pattern.
    Type: Application
    Filed: December 10, 2021
    Publication date: June 30, 2022
    Inventors: Min-Cheol KANG, Dong Hoon KUK