Abstract: The inventive concept provides an inkjet printing method. The inkjet printing method for discharging an ink on a substrate using a head having a plurality of nozzles formed thereon includes determining a grade of nozzles by measuring a discharge performance of the nozzles, which is a grading step; selecting a use nozzle that can participate in printing the substrate among the nozzles based on the grade determined at the grading step, which is a nozzle selecting step; and discharging the ink on the substrate using at least one nozzle among use nozzles, which is a printing step.

Abstract: An anomaly detection method capable of minimizing the consumption of computing resources and time is provided. The anomaly detection method includes: learning a first classifier, which includes an encoder and a decoder, using a plurality of training data, which are classified into a plurality of first subsets; extracting features from the plurality of training data by computing the plurality of training data with the encoder of the learned first classifier; reconstructing the plurality of training data into a plurality of second subsets by clustering the plurality of training data based on the extracted features; learning a plurality of second classifiers, which correspond to the plurality of second subsets, using the second subsets; and detecting any abnormality in input data using the plurality of second classifiers.

Abstract: The present invention provides an apparatus and method for diagnosing semiconductor equipment for analyzing a determination result and a cause of a defect for a substrate using a deep learning algorithm and explainable AI. The semiconductor equipment diagnosis method comprises acquiring time series data for a parameter related to a substrate treating process of a substrate treating apparatus, generating table information based on the time series data, converting the table information into image information based on data included in the table information, extracting and classifying a feature from the image information, determining whether a substrate treated by the substrate treating apparatus is good or defective based on the feature, and analyzing a cause of a defect of the substrate in response to determining that the substrate is defective.

Abstract: The inventive concept provides an inkjet printing method. The inkjet printing method for discharging an ink on a substrate using a head having a plurality of nozzles formed thereon includes determining a grade of nozzles by measuring a discharge performance of the nozzles, which is a grading step; selecting a use nozzle that can participate in printing the substrate among the nozzles based on the grade determined at the grading step, which is a nozzle selecting step; and discharging the ink on the substrate using at least one nozzle among use nozzles, which is a printing step.