Abstract: A substrate processing apparatus using plasma capable of efficiently controlling the selectivity ratio of a silicon layer and an oxide layer is provided. The substrate processing apparatus comprises a first space disposed between an electrode and an ion blocker; a second space disposed between the ion blocker and a shower head; a processing space under the shower head for processing a substrate; a first supply hole for providing a first gas for generating plasma to the first space; a second supply hole for providing a second gas to be mixed with an effluent of the plasma to the second space; and a first coating layer formed on a first surface of the shower head facing the second space, not formed on a second surface of the shower head facing the processing space, and containing nickel.

Abstract: The disclosure relates to footwear for infants and toddlers manufactured according to foot shape characteristics and walking characteristics of infants and toddlers, different from those of adults, and a last used for manufacturing the same. The footwear for infants and toddlers includes an inner space composed of a toe room in which the toe is disposed, a heel room in which the heel is disposed, and a middle room located between the toe and the heel and in which the foot sole and the foot top are disposed. In particular, since the toe room is formed higher than the toe, an infant or toddler walks while minimizing interference in toe movement.

Abstract: The present invention relates to a rear balance walking shoe having a sole in which double earth axes are formed on the sole at a rear side with respect to the middle of the sole, and the heel and the toe of the sole are elevated from respective double earth axes and perform see-saw motions at the double earth axes serving as application points. By wearing these shoes, the center of gravity of a wearer's body is inclined backward, resulting in reduction of obesity by activating muscles of the trunk. Still further, since a wearer feels comfortable even if the wearer wears the shoes for a long time and can reduce impact transferred to the wearer's feet, an exercise effect is enhanced.