Abstract: A gas supplying unit for supplying multiple gases includes an outer pipe and at least one inner pipe positioned inside of the outer pipe, wherein a first process gas supplied to the inner pipe is jetted outwardly from the outer pipe through a plurality of first gas jet orifices, and a second process gas supplied to the outer pipe is jetted outwardly from the outer pipe through a plurality of second gas jet orifices.

Abstract: A heat treatment method which can prevent heat deformation of a substrate caused during a heat treatment process on the substrate with a thin film formed on its surface is provided. The heat treatment method in accordance with the present invention includes (a) stacking a second substrate 10b on a first substrate 10a; and (b) stacking a weight 20 on the second substrate 10b, wherein the first substrate 10a and the second substrate 10b are stacked, with thin films 12 of the substrates 10a and 10b being in contact with each other. In accordance with the present invention, deformation of the substrate can be prevented by stacking the substrates, with thin films formed on the substrates being in contact with each other, and placing a weight on the stacked substrates during the heat treatment process.

Abstract: A solar cell mode and a method for manufacturing the same are disclosed. The solar battery module in accordance with the present invention includes a plurality of solar cells arranged in row and column directions; and a conductive ribbon electrically connecting the plurality of solar cells, wherein each of the solar cells has a structure in which a first photoelectric element including a polycrystalline semiconductor layer and a second photoelectric element including an amorphous semiconductor layer are stacked.

Abstract: A solar cell and a manufacturing method thereof are disclosed. The solar cell in accordance with the present invention includes a substrate 100; a lower electrode 111a formed on the substrate 100; a photoelectric element unit 200a including a polycrystalline photoelectric element 210 formed on the lower electrode 111a and formed by stacking a plurality of polycrystalline semiconductor layers 211a, 212a, and 213a, and a amorphous photoelectric element 220 formed on the polycrystalline photoelectric element 210 and formed by stacking a plurality of amorphous semiconductor layers 221, 222, and 223; and an upper electrode 400 formed on the photoelectric element unit 200a.

Abstract: A heat treatment method which can prevent heat deformation of a substrate caused during a heat treatment process on the substrate with a thin film formed on its surface is provided. The heat treatment method in accordance with the present invention includes (a) stacking a second substrate 10b on a first substrate 10a; and (b) stacking a weight 20 on the second substrate 10b, wherein the first substrate 10a and the second substrate 10b are stacked, with thin films 12 of the substrates 10a and 10b being in contact with each other. In accordance with the present invention, deformation of the substrate can be prevented by stacking the substrates, with thin films formed on the substrates being in contact with each other, and placing a weight on the stacked substrates during the heat treatment process.