Patents by Inventor Dong Kun YOO

Dong Kun YOO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Support unit and apparatus for treating substrate
    Patent number: 10109466
    Abstract: Provided is a support unit. The support unit includes a support plate having a top surface in which a measurement groove is defined and on which a substrate is placed, and a sensor for measuring a pressure in the measurement groove in the state where the substrate is placed on the support plate. The measurement groove has a main measurement groove that extends from a central area of the support plate up to an edge area of the support plate.
    Type: Grant
    Filed: December 2, 2014
    Date of Patent: October 23, 2018
    Assignee: PSK INC.
    Inventor: Dong Kun Yoo
  • SUPPORT UNIT AND APPARATUS FOR TREATING SUBSTRATE
    Publication number: 20150206723
    Abstract: Provided is a support unit. The support unit includes a support plate having a top surface in which a measurement groove is defined and on which a substrate is placed, and a sensor for measuring a pressure in the measurement groove in the state where the substrate is placed on the support plate. The measurement groove has a main measurement groove that extends from a central area of the support plate up to an edge area of the support plate.
    Type: Application
    Filed: December 2, 2014
    Publication date: July 23, 2015
    Inventor: Dong Kun YOO